Nanoprecision Control of Shape and Performance Manufacturing Technology for High-Energy Laser Silicon Components

Feng Shi; Ye Tian; Shuo Qiao; Guangqi Zhou; Ci Song; Shuai Xue; Guipeng Tie; Lin Zhou; Yong Shu; Gang Zhou

doi:10.3788/CJL202148.0401007

[1] Wang G L, Feng Z J, Zheng Q C et al. Molecular dynamics simulation of nano-polishing of single crystal silicon on non-continuous surface[J]. Materials Science in Semiconductor Processing, 118, 105168(2020). http://www.sciencedirect.com/science/article/pii/S1369800120302158

[2] Yu D M, Duan W B, Li D Q et al. Design and fabrication of polarization- and phase-modulated mirror[J]. Acta Optica Sinica, 40, 1531001(2020).

[3] Shao S C, Tao X P, Wang X K. On-machine surface shape measurement of reflective mirrors by ultra-precision turning based on fringe reflection[J]. Laser & Optoelectronics Progress, 55, 071203(2018).

[4] Zegrya A G, Sokolov V V, Zegrya G G et al. The effect of the doping level of starting silicon single crystals on structural parameters of porous silicon produced by electrochemical etching[J]. Technical Physics Letters, 45, 1067-1070(2019). http://www.researchgate.net/publication/337959351_The_Effect_of_the_Doping_Level_of_Starting_Silicon_Single_Crystals_on_Structural_Parameters_of_Porous_Silicon_Produced_by_Electrochemical_Etching

[5] Tian Y, Shi F, Dai Y F et al. Laser absorption precursor research: microstructures in the subsurface of mono-crystalline silicon substrate[J]. Applied Optics, 56, 8507-8512(2017).

[6] Tian Y, Dai Y F, Shi F et al. Correlation between substrate surface quality and laser energy absorption rate for mono-crystalline silicon reflector[J]. Journal of National University of Defense Technology, 37, 26-29(2015).

[7] Wang P Z, Wang B, Melkote S N. Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon[J]. International Journal of Mechanical Sciences, 175, 105527(2020). http://www.sciencedirect.com/science/article/pii/S0020740319338093

[8] Zhang X, Huang T, Xiao R S. Behavior characteristics of different crystal surfaces of monocrystal silicon under femtosecond laser irradiation[J]. Chinese Journal of Lasers, 44, 0102012(2017).

[9] Zhang L C, Zarudi I. Towards a deeper understanding of plastic deformation in mono-crystalline silicon[J]. International Journal of Mechanical Sciences, 43, 1985-1996(2001). http://www.sciencedirect.com/science/article/pii/S0020740301000248

[10] Zhou L B, Kawai S, Honda M et al. Research on chemo-mechanical-grinding (CMG) of Si wafer.1st report: development of CMG wheel[J]. Journal of the Japan Society for Precision Engineering, 68, 1559-1563(2002). http://ci.nii.ac.jp/naid/110001373342

[11] Zhou L B, Kawai S, Honda M et al. Research on chemo-mechanical-grinding (CMG) of Si wafer. 2nd report: generation of defect free surface on φ300 mm Si wafer by fixed abrasive process[J]. Journal of the Japan Society for Precision Engineering, 71, 466-470(2005). http://ci.nii.ac.jp/naid/10015505910

[12] Kang R K, Tian Y B, brittle crystal substrates: CN1951635[P]. -04-25(2007).

[13] Jin Z, Li J S, Kang R K et al. Ultra-precision manufacturing technology with soft abrasive grinding for silicon[J]. Opto-Electronic Engineering, 38, 75-80(2011).

[14] Chen B. Key technology on ultra-precision grinding of infrared aspheric lens[D]. Harbin:Harbin Institute of Technology(2015).

[15] Niu Y J, Dai Y F, Guan C L et al. Study on the technology of ultra-precision grinding for aspheric mirror of monocrystalline silicon. [C]//The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology. Harbin: [s.n.](2015).

[16] Yin S H, Chen F J, Zhang D C et al. Nano-precision finishing process integrated with ELID-grinding and MRF for silicon mirror[J]. Nanotechnology and Precision Engineering, 5, 220-223(2007).

[17] Tian Y. The key technology research of high-precision and low-defect fabrication for silicon reflectors[D]. Changsha: National University of Defense Technology(2018).

[18] Shen Z X, Ma B, Wang Z S et al. Fabrication of flat and supersmooth surfaces with bowl-feed polishing process[J]. Proceedings of SPIE, 6722, 67220U(2007).

[19] Suratwala T I, Miller P E, Bude J D et al. HF-based etching processes for improving laser damage resistance of fused silica optical surfaces[J]. Journal of the American Ceramic Society, 94, 416-428(2011).

[20] Chen M Y, Cheng W M. Wang C W W. Multiaperture overlap-scanning technique for large-aperture test[J]. Proceedings of SPIE, 1553, 626-635(1992). http://spie.org/Publications/Proceedings/Paper/10.1117/12.135344

[21] Cheng W M, Chen M Y. Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests[J]. Optical Engineering, 32, 1947-1950(1993).

[22] Zhou L. Study on theory and technology in ion beam figuring for optical surfaces[D]. Changsha: National University of Defense Technology(2008).

[23] Song C, Tian Y, Shi F et al. Process optimization for cylindrical single-crystal silicon mirror with a tilted incident ion beam figuring[J]. Acta Optica Sinica, 40, 1222001(2020).