• Acta Optica Sinica
  • Vol. 36, Issue 3, 331001 (2016)
Wu Han1、*, Zhang Jinlong1, Li Gangzheng2, and Sun Yinghui2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201636.0331001 Cite this Article Set citation alerts
    Wu Han, Zhang Jinlong, Li Gangzheng, Sun Yinghui. Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure[J]. Acta Optica Sinica, 2016, 36(3): 331001 Copy Citation Text show less
    References

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    [2] Tang Jinfa, Gu Peifu, Liu Xu, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 385-388.

    [3] Amra C, Grezes-Besset C, Maure S, et al.. Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem[C]. SPIE, 1994, 2253: 1184-1200.

    [4] Elson J M. Theory and Software for Light Scattering from Multilayer Optical Components with Interfacial Roughness[R]. Naval Air Warfare Center, Weapons Division, China Lake, CA, Technical Publication 8084, 1992.

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    [6] Kassam S, Duparré A, Hehl K, et al.. Light scattering from the volume of optical thin films: theory and experiment[J]. Applied Optics, 1992, 31(9): 1304-1313.

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    [9] Yang Lihong, Wang Tao, Su Junhong, et al.. Influence of laser condition on the damage properties of HfO2 thin film[J]. Acta Optica Sinica, 2013, 33(12): 1231001.

    [10] Thielsch R, Gatto A, Heber J, et al.. A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition[J]. Thin Solid Films, 2002, 410(1-2): 86- 93.

    [11] He Junpeng, Zhang Yueguang, Shen Weidong, et al.. Optical properties of Al2O3 thin film fabricated by atomic layer deposition[J]. Acta Optica Sinica, 2010, 30(1): 277-282.

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    Wu Han, Zhang Jinlong, Li Gangzheng, Sun Yinghui. Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure[J]. Acta Optica Sinica, 2016, 36(3): 331001
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