• Acta Optica Sinica
  • Vol. 40, Issue 14, 1405002 (2020)
Ran Zhao, Chonglei Sun, Xiao Xu, and Jia Zhao*
Author Affiliations
  • School of Information Science and Engineering, Shandong University, Qingdao, Shandong 266237, China
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    DOI: 10.3788/AOS202040.1405002 Cite this Article Set citation alerts
    Ran Zhao, Chonglei Sun, Xiao Xu, Jia Zhao. Ultra-Compact Vertical Optical Coupler Based on Subwavelength Grating[J]. Acta Optica Sinica, 2020, 40(14): 1405002 Copy Citation Text show less
    Schematics of designed vertical optical coupler. (a) 3D diagram; (b) cross-sectional view; (c) top view; (d) 3D diagram of SWG and tapered waveguide
    Fig. 1. Schematics of designed vertical optical coupler. (a) 3D diagram; (b) cross-sectional view; (c) top view; (d) 3D diagram of SWG and tapered waveguide
    Effective refractive index versus equivalent refractive index of SWG
    Fig. 2. Effective refractive index versus equivalent refractive index of SWG
    Coupling ratio versus number of periods of subwavelength grating
    Fig. 3. Coupling ratio versus number of periods of subwavelength grating
    Coupling ratio versus wavelength for vertical coupler
    Fig. 4. Coupling ratio versus wavelength for vertical coupler
    Normalized electric field intensity of light field. (a) Top view; (b) side view; (c) cross-sectional light field distribution at A; (d) cross-sectional light field distribution at B; (e) cross-sectional light field distribution at C
    Fig. 5. Normalized electric field intensity of light field. (a) Top view; (b) side view; (c) cross-sectional light field distribution at A; (d) cross-sectional light field distribution at B; (e) cross-sectional light field distribution at C
    Fabrication process
    Fig. 6. Fabrication process
    Tolerance analysis of process errors. (a)Coupling ratio versus duty cycle; (b) coupling ratio versus tip width of tapered waveguide; (c) coupling ratio versus misalignment, and position of coupler relative to LN waveguide indicated in inset
    Fig. 7. Tolerance analysis of process errors. (a)Coupling ratio versus duty cycle; (b) coupling ratio versus tip width of tapered waveguide; (c) coupling ratio versus misalignment, and position of coupler relative to LN waveguide indicated in inset
    ParameterValue
    Wavelength λ /nm1550
    Thickness of SiO2 /μm3
    Thickness of Si /nm220
    Width of Si waveguide /nm400
    Height of BCB /nm300
    Refractive index of BCB1.54
    Height of LN waveguide /nm600
    W1 /μm1
    W2 /μm1.4
    Height of LN ridge waveguide h /nm180
    Refractive index of LN2.14
    Width of SWG Wg /nm400
    Width of taper tip Wt /nm80
    Table 1. Material parameters and structural parameters of designed vertical optical coupler waveguide
    Ran Zhao, Chonglei Sun, Xiao Xu, Jia Zhao. Ultra-Compact Vertical Optical Coupler Based on Subwavelength Grating[J]. Acta Optica Sinica, 2020, 40(14): 1405002
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