Researching | A high power, high repetition rate KrF excimer laser with narrow spectrum width

Journals >Acta Optica Sinica >Volume 12 >Issue 6 >Page 511 > Article

Acta Optica Sinica
Vol. 12, Issue 6, 511 (1992)

A high power, high repetition rate KrF excimer laser with narrow spectrum width

[in Chinese]¹ and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese]. A high power, high repetition rate KrF excimer laser with narrow spectrum width[J]. Acta Optica Sinica, 1992, 12(6): 511 Copy Citation Text

show less

Abstract

A KrF resonator-amplifier excimer laser system using for submicro fine processing was reported. This system can operate in the situation of 200 Hz repetition rate with output power of 24.4 W and spectrum of 2.3×10-3 nm. Its spectrum drift is less 5×10-4 nm during operation.

Keywords

excimer laser high repetition rate high power

Get PDF(in Chinese)

Figures&Tables (0)

Copy Citation Text

[in Chinese], [in Chinese]. A high power, high repetition rate KrF excimer laser with narrow spectrum width[J]. Acta Optica Sinica, 1992, 12(6): 511

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address