• Acta Optica Sinica
  • Vol. 8, Issue 3, 261 (1988)
DUAN ZHIPING1 and ZHOU JIULIN2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    DUAN ZHIPING, ZHOU JIULIN. Vapor-phase mixed deposition of optical coatings[J]. Acta Optica Sinica, 1988, 8(3): 261 Copy Citation Text show less

    Abstract

    Two thin-film materials are evaporated simultaneously from reepective sources in vacuum where vapor-phase mixed thin films will be formed. Experimental methods are described for the vapor-phase mixed deposition, and three programs for controlling deposition are presented. The experimental results of two broad-band antireflection coatings are given as practical examples. Experiments show that vapor-phase mixed deposition is a promising technique for application.