The excitation temperature of plasma with slurry nebulization into inductively coupled plasma emission spectrometry was determined and reported in the present paper.Ti-lines and multi spectrum lines method were chosen and used to determine the excitation temperature with nebulization into the inductively coupled plasma with both aqueous solution and 0.05% titanium slurry.There were approximately the same plasma excitation temperatures of 5 000-6 000 K for the two nebulization ways.The experiment verified that the excitation temperature only showed a little increase with RF power increasing.This means that the atomization efficiency did not change remarkably with slurry nebulization into the inductively coupled plasma if only the RF power was increased.Therefore,the analytical results were not much improved in the inductively coupled plasma emission spectrometry with slurry nebulization when only changing RF power.