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    Journals >Laser & Optoelectronics Progress >Volume 50 >Issue 10 >Page 101101 > Article
    • Laser & Optoelectronics Progress
    • Vol. 50, Issue 10, 101101 (2013)
    Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective
    Sun Zhen* and Gong Yan
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    DOI: 10.3788/lop50.101101 Cite this Article Set citation alerts
    Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101 Copy Citation Text show less
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    Article index updated: May. 18, 2024
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    Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101
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