The densive silver nanoparticle array was deposited by using systemic nanometer particle beam gas phase deposition method. Through real time monitoring the extinction spectrum of the nanoparticles and the fine control on the nanoparticle array coverage, the systemic control of surface plasmon resonance frequency was realized. With the increasing of the density of Ag nanoparticles, the redshift of the surface plasmon resonance wavelength occurred from less than 400 nm to more than 570 nm. It was found that change of surface plasmon resonance wavelength is related to the percent of closely linked pairs among the deposited nanoparticles.