• Chinese Optics Letters
  • Vol. 9, Issue 9, 093201 (2011)
Zehua Wu, Nan Zhang, Mingwei Wang, and Xiaonong Zhu
Author Affiliations
  • Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China
  • show less
    DOI: 10.3788/col201109.093201 Cite this Article Set citation alerts
    Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201 Copy Citation Text show less
    References

    [1] B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. T unnermann, Appl. Phys. A 63, 109 (1996).

    [2] Y. Wu, C. Wang, W. Jia, X. Ni, M. Hu, and L. Chai, Chin. Opt. Lett. 6, 51 (2008).

    [3] Y. Li, H. Jiang, H. Yang, and Q. Gong, Chin. Opt. Lett. 3, (suppl.) 200 (2008).

    [4] Y. Zhu, H. Mei, T. Zhu, J. Zhang, and S. Yin, Chin. Opt. Lett. 7, 675 (2009).

    [5] W. Jia, B. Zhou, X. Li, L. Chai, R. Zhang, and C. Wang, Chin. Opt. Lett. 8, 38 (2010).

    [6] Y. Zhang, X. Jia, P. Xiong, and T. Jia, Chin. Opt. Lett. 8, 1203 (2010).

    [7] E. Stratakis, M. Barberoglou, C. Fotakis, G. Viau, C. Garcia, and G. A. Shafeev, Opt. Express 17, 12650 (2009).

    [8] A. S. Mahmood, M. Sivakumar, K. Venkatakrishnan, and B. Tan, Appl. Phys. Lett. 95, 034107 (2009).

    [9] J. Perriμere, E. Millon, W. Seiler, C. Boulmer-Leborgne, V. Craciun, O. Albert, J. C. Loulergue, and J. Etchepare, J. Appl. Phys. 91, 690 (2002).

    [10] S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello, X. Wang, G. Ausanio, V. Iannotti, and L. Lanotte, Appl. Phys. Lett. 84, 4502 (2004).

    [11] S. Amoruso, R. Bruzzese, X. Wang, and J. Xia, Appl. Phys. Lett. 92, 041503 (2008).

    [12] M. Lenner, A. Kaplan, Ch. Huchon, and R. E. Palmer, Phys. Rev. B 79, 184105 (2009).

    [13] K. Oguri, Y. Okano, T. Nishikawa, and H. Nakano, Phys. Rev. B 79, 144106 (2009).

    [14] N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, Phys. Rev. Lett. 99, 167602 (2007).

    [15] X. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).

    [16] X. Wang, T. Jia, X. Li, C. Li, D. Feng, H. Sun, S. Xu, and Z. Xu, Chin. Opt. Lett. 3, 615 (2005).

    [17] T. Wu, C. Zhou, E. Dai, and J. Xie, Chin. Opt. Lett. 7, 653 (2009).

    [18] C. T. Hebeisen, G. Sciaini, M. Harb, R. Ernstorfer, S. G. Kruglik, and R. J. D. Miller, Phys. Rev. B 78, 081403 (R) (2008).

    [19] D. Perez and L. J. Lewis, Phys. Rev. B 67, 184102 (2003).

    [20] X. Liu and Y. Wang, Chin. Opt. Lett. 3, 57 (2005).

    [21] W. G. Roeterdink, L. B. F. Juurlink, O. P. H. Vaughan, J. Dura Diez, M. Bonn, and A. W. Kleyn, Appl. Phys. Lett. 82, 4190 (2003).

    [22] P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. Lett. 91, 225502 (2003).

    [23] F. Vidal, T. W. Johnston, S. Laville, O. Barth elemy, M. Chaker, B. Le Drogoff, J. Margot, and M. Sabsabi, Phys. Rev. Lett. 86, 2573 (2001).

    [24] D. Perez and L. J. Lewis, Phys. Rev. Lett. 89, 255504 (2002).

    [25] X. Wang and X. Xu, J. Thermal Stresses, 25, 457 (2002).

    [26] Z. Wu, X. Zhu, and N. Zhang, J. Appl. Phys. 109, 053113 (2011).

    [27] G. Callies, P. Berger, and H. Hugel, J. Phys. D 28, 794 (1995).

    [28] E. G. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. L. Davies, L. Hallo, P. Nicolai, and V. T. Tikhonchuk, Phys. Rev. B 73, 214101 (2006).

    [29] C. Cheng and X. Xu, Phys. Rev. B 67, 165415 (2005).

    CLP Journals

    [1] Zhichao Jia, Tingzhong Zhang, Huazhong Zhu, Zewen Li, Zhonghua Shen, Jian Lu, Xiaowu Ni. Stress damage process of silicon wafer under millisecond laser irradiation[J]. Chinese Optics Letters, 2018, 16(1): 011404

    [2] Qiang Zhou, Rong Qiu, Yong Jiang, Xiang Gao, Yongjia Yang, Huili Wang, Huan Ren. Ultra-fast diagnosis of shock waves and plasma at front and rear surfaces in the bulk of fused silica induced by an Nd:YAG pulse laser[J]. Chinese Optics Letters, 2016, 14(5): 051402

    Data from CrossRef

    [1] Qingsong Wang, Lan Jiang, Jingya Sun, Changji Pan, Weina Han, Guoyan Wang, Feifei Wang, Kaihu Zhang, Ming Li, Yongfeng Lu. Structure-Mediated Excitation of Air Plasma and Silicon Plasma Expansion in Femtosecond Laser Pulses Ablation. Research, 2018, 1(2018).

    [2] Maryam Sardar, Chen Jun, Zaka Ullah, Aasma Tabassum, Mohsan Jelani, Ju Cheng, Yuxiang Sun, Xueming Lv, Lu Jian. Investigations on surface morphology and bandgap engineering of single crystal boron-doped silicon irradiated by a nanosecond laser. Applied Optics, 57, 1296(2018).

    [3] Junfeng Shao (邵俊峰), Tingfeng Wang (王挺峰), Jin Guo (郭劲), Anmin Chen (陈安民), Mingxing Jin (金明星). Effect of cylindrical cavity height on laser-induced breakdown spectroscopy with spatial confinement. Plasma Science and Technology, 19, 025506(2017).

    [4] Zehua Wu, Nan Zhang, Xiaonong Zhu, Liqun An, Gangzhi Wang, Ming Tan. Time-resolved shadowgraphs and morphology analyses of aluminum ablation with multiple femtosecond laser pulses. Chinese Physics B, 27, 077901(2018).

    [5] Tao L?, Yang Hu, Jiuling Meng, Zihan Li, Changjiang Zhang, Xiaocheng Zhang, Emmanuel Tuyizere. Secondary shock wave: Implication for laser ablation inductively coupled plasma mass spectrometry. Journal of Applied Physics, 124, 073101(2018).

    [6] Xiaowei Wang, Anmin Chen, Ying Wang, Dan Zhang, Laizhi Sui, Da Ke, Suyu Li, Yuanfei Jiang, Mingxing Jin. Spatial confinement effect on femtosecond laser-induced Cu plasma spectroscopy. Physics of Plasmas, 24, 103305(2017).

    Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201
    Download Citation