Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu; Nan Zhang; Mingwei Wang; Xiaonong Zhu

doi:10.3788/col201109.093201

Journals >Chinese Optics Letters >Volume 9 >Issue 9 >Page 093201 > Article

Chinese Optics Letters
Vol. 9, Issue 9, 093201 (2011)

Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu, Nan Zhang, Mingwei Wang, and Xiaonong Zhu

Author Affiliations

Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China

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DOI: 10.3788/col201109.093201 Cite this Article Set citation alerts

Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201 Copy Citation Text

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Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201

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