Quanze LI, Zunkai HUANG, Li TIAN, Yongxin ZHU, Hui WANG, Songlin FENG. An Efficient Implementation Method of Arbitrary Gradient Doping and Its Application[J]. Acta Photonica Sinica, 2022, 51(6): 0623002
- Acta Photonica Sinica
- Vol. 51, Issue 6, 0623002 (2022)
Fig. 1. Schematic of movement process of implanted ions in silicon wafer
Fig. 2. Schematic of ion implantation and diffusion
Fig. 3. One dimensional and two-dimensional simulation results
Fig. 4. The state of the substrate doping region at different times
Fig. 5. General flow of FSI single pixel sensor manufacturing
Fig. 6. Flow of STI manufacturing
Fig. 7. Schematic of lithography mask layout design
Fig. 8. Schematic of pixel three-dimensional structure
Fig. 9. Comparison of transverse doping distribution of gradient doped and uniform doped photodiodes
Fig. 10. Transverse potential distribution in gradient doped photodiode region
Fig. 11. Comparison between grid voltage and readout signal
Fig. 12. Comparison of readout signals with completely depleted collection area
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Table 1. Design scheme of mask opening center and width
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Table 2. Comparison of FSI image sensor pixels designed in this paper and references
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