[1] Y M Liu, X Zhang. Metamaterials: a new frontier of science and technology. Chem Soc Rev, 40, 2494-2507(2011).
[2] N I Zheludev, Y S Kivshar. From metamaterials to metadevices. Nat Mater, 11, 917-924(2012).
[3] Z J Wong, Y Wang, K O'Brien, J Rho, X B Yin et al. Optical and acoustic metamaterials: superlens, negative refractive index and invisibility cloak. J Opt, 19, 084007(2017).
[4] H Cheng, Z C Liu, S Q Chen, J G Tian. Emergent functionality and controllability in few-layer metasurfaces. Adv Mater, 27, 5410-5421(2015).
[5] H T Chen, A J Taylor, N F Yu. A review of metasurfaces: physics and applications. Rep Prog Phys, 79, 076401(2016).
[6] P Genevet, F Capasso, F Aieta, M Khorasaninejad, R Devlin. Recent advances in planar optics: from plasmonic to dielectric metasurfaces. Optica, 4, 139-152(2017).
[7] N F Yu, F Capasso. Flat optics with designer metasurfaces. Nat Mater, 13, 139-150(2014).
[8] Q He, S L Sun, S Y Xiao, L Zhou. High-efficiency metasurfaces: principles, realizations, and applications. Adv Opt Mater, 6, 1800415(2018).
[9] B Assouar, B Liang, Y Wu, Y Li, J C Cheng et al. Acoustic metasurfaces. Nat Rev Mater, 3, 460-472(2018).
[10] R A Shelby, D R Smith, S Schultz. Experimental verification of a negative index of refraction. Science, 292, 77-79(2001).
[11] D Schurig, J J Mock, B J Justice, S A Cummer, J B Pendry et al. Metamaterial electromagnetic cloak at microwave frequencies. Science, 314, 977-980(2006).
[12] P Moitra, Y M Yang, Z Anderson, I I Kravchenko, D P Briggs et al. Realization of an all-dielectric zero-index optical metamaterial. Nat Photonics, 7, 791-795(2013).
[13] Y Li, S Kita, P Muñoz, O Reshef, D I Vulis et al. On-chip zero-index metamaterials. Nat Photonics, 9, 738-742(2015).
[14] J B Sun, N M Litchinitser. Toward practical, subwavelength, visible-light photolithography with hyperlens. ACS Nano, 12, 542-548(2018).
[15] P V Kapitanova, P Ginzburg, F J Rodríguez-Fortuño, D S Filonov, P M Voroshilov et al. Photonic spin Hall effect in hyperbolic metamaterials for polarization-controlled routing of subwavelength modes. Nat Commun, 5, 3226(2014).
[16] A Poddubny, I Iorsh, P Belov, Y Kivshar. Hyperbolic metamaterials. Nat Photonics, 7, 948-957(2013).
[17] L Lu, J D Joannopoulos, M Soljačić. Topological photonics. Nat Photonics, 8, 821-829(2014).
[18] Y Wu, C Li, X Y Hu, Y T Ao, Y F Zhao et al. Applications of topological photonics in integrated photonic devices. Adv Opt Mater, 5, 1700357(2017).
[19] A B Khanikaev, G Shvets. Two-dimensional topological photonics. Nat Photonics, 11, 763-773(2017).
[20] T Ozawa, H M Price, A Amo, N Goldman, M Hafezi et al. Topological photonics. Rev Mod Phys, 91, 015006(2019).
[21] G C Ma, M Xiao, C T Chan. Topological phases in acoustic and mechanical systems. Nat Rev Phys, 1, 281-294(2019).
[22] H Cheng, S Q Chen, H F Yang, J J Li, X An et al. A polarization insensitive and wide-angle dual-band nearly perfect absorber in the infrared regime. J Opt, 14, 085102(2012).
[23] J X Li, P Yu, C C Tang, H Cheng, J J Li et al. Bidirectional perfect absorber using free substrate plasmonic metasurfaces. Adv Opt Mater, 5, 1700152(2017).
[24] Z C Li, W W Liu, C C Tang, H Cheng, Z Li et al. A bilayer plasmonic metasurface for polarization-insensitive bidirectional perfect absorption. Adv Theory Simul, 3, 1900216(2020).
[25] Z Y Fang, J Y Cai, Z B Yan, P Nordlander, N J Halas et al. Removing a wedge from a metallic nanodisk reveals a Fano resonance. Nano Lett, 11, 4475-4479(2011).
[26] X Y Duan, S Q Chen, H F Yang, H Cheng, J J Li et al. Polarization-insensitive and wide-angle plasmonically induced transparency by planar metamaterials. Appl Phys Lett, 101, 143105(2012).
[27] H T Chen, J F Zhou, J F O'Hara, F Chen, A K Azad et al. Antireflection coating using metamaterials and identification of its mechanism. Phys Rev Lett, 105, 073901(2010).
[28] L Huang, C C Chang, B B Zeng, J Nogan, S N Luo et al. Bilayer metasurfaces for dual- and broadband optical antireflection. ACS Photonics, 4, 2111-2116(2017).
[29] J K Gansel, M Thiel, M S Rill, M Decker, K Bade et al. Gold helix photonic metamaterial as broadband circular polarizer. Science, 325, 1513-1515(2009).
[30] Y Zhao, A Alù. Tailoring the dispersion of plasmonic nanorods to realize broadband optical meta-waveplates. Nano Lett, 13, 1086-1091(2013).
[31] W W Wan, J Gao, X D Yang. Metasurface holograms for holographic imaging. Adv Opt Mater, 5, 1700541(2017).
[32] F Ding, A Pors, S I Bozhevolnyi. Gradient metasurfaces: a review of fundamentals and applications. Rep Prog Phys, 81, 026401(2018).
[33] M R Akram, G Ding, K Chen, Y Feng, W Zhu. Ultrathin Single Layer Metasurfaces with Ultra-Wideband Operation for Both Transmission and Reflection. Adv Mater, 32, 1907308(2020).
[34] L L Huang, X Z Chen, H Mühlenbernd, G X Li, B F Bai et al. Dispersionless phase discontinuities for controlling light propagation. Nano Lett, 12, 5750-5755(2012).
[35] M Khorasaninejad, F Capasso. Metalenses: Versatile multifunctional photonic components. Science, 358, eaam8100(2017).
[36] S Liu, T J Cui. Concepts, working principles, and applications of coding and programmable metamaterials. Adv Opt Mater, 5, 1700624(2017).
[37] G X Li, S Zhang, T Zentgraf. Nonlinear photonic metasurfaces. Nat Rev Mater, 2, 17010(2017).
[38] S Q Chen, Z Li, Y B Zhang, H Cheng, J G Tian. Phase manipulation of electromagnetic waves with metasurfaces and its applications in nanophotonics. Adv Opt Mater, 6, 1800104(2018).
[39] D D Wen, F Y Yue, W W Liu, S Q Chen, X Z Chen. Geometric metasurfaces for ultrathin optical devices. Adv Opt Mater, 6, 1800348(2018).
[40] S B Glybovski, S A Tretyakov, P A Belov, Y S Kivshar, C R Simovski. Metasurfaces: From microwaves to visible. Phys Rep, 634, 1-72(2016).
[41] S L Sun, Q He, J M Hao, S Y Xiao, L Zhou. Electromagnetic metasurfaces: physics and applications. Adv Opt Photonics, 11, 380-479(2019).
[42] S Q Chen, Z C Li, W W Liu, H Cheng, J G Tian. From single-dimensional to multidimensional manipulation of optical waves with metasurfaces. Adv Mater, 31, 1802458(2019).
[43] S Q Chen, W W Liu, Z C Li, H Cheng, J G Tian. Metasurface-empowered optical multiplexing and multifunction. Adv Mater, 32, 1805912(2020).
[44] S Q Chen, Y B Zhang, Z Li, H Cheng, J G Tian. Empowered layer effects and prominent properties in few-layer metasurfaces. Adv Opt Mater, 7, 1801477(2019).
[45] Q Wang, X Q Zhang, Y H Xu, J Q Gu, Y F Li et al. Broadband metasurface holograms: toward complete phase and amplitude engineering. Sci Rep, 6, 32867(2016).
[46] X J Ni, A V Kildishev, V M Shalaev. Metasurface holograms for visible light. Nat Commun, 4, 2807(2013).
[47] J Y H Teo, L J Wong, C Molardi, P Genevet. Controlling electromagnetic fields at boundaries of arbitrary geometries. Phys Rev A, 94, 023820(2016).
[48] J Ding, N N Xu, H Ren, Y K Lin, W L Zhang et al. Dual-wavelength terahertz metasurfaces with independent phase and amplitude control at each wavelength. Sci Rep, 6, 34020(2016).
[49] Z C Liu, S Q Chen, J X Li, H Cheng, Z C Li et al. Fully interferometric controllable anomalous refraction efficiency using cross modulation with plasmonic metasurfaces. Opt Lett, 39, 6763-6766(2014).
[50] Z C Liu, S Q Chen, H Cheng, Z C Li, W W Liu et al. Interferometric control of signal light intensity by anomalous refraction with plasmonic metasurface. Plasmonics, 11, 353-358(2016).
[52] S L Jia, X Wan, P Su, Y J Zhao, T J Cui. Broadband metasurface for independent control of reflected amplitude and phase. AIP Adv, 6, 045024(2016).
[53] L X Liu, X Q Zhang, M Kenney, X Q Su, N N Xu et al. Broadband metasurfaces with simultaneous control of phase and amplitude. Adv Mater, 26, 5031-5036(2014).
[54] X Wan, S L Jia, T J Cui, Y J Zhao. Independent modulations of the transmission amplitudes and phases by using Huygens metasurfaces. Sci Rep, 6, 25639(2016).
[55] X Song, L L Huang, C C Tang, J J Li, X W Li et al. Selective diffraction with complex amplitude modulation by dielectric metasurfaces. Adv Opt Mater, 6, 1701181(2018).
[56] A Arbabi, A Faraon. Fundamental limits of ultrathin metasurfaces. Sci Rep, 7, 43722(2017).
[57] S L Sun, K Y Yang, C M Wang, T K Juan, W T Chen et al. High-efficiency broadband anomalous reflection by gradient meta-surfaces. Nano Lett, 12, 6223-6229(2012).
[58] Z Li, H Cheng, Z C Liu, S Q Chen, J G Tian. Plasmonic airy beam generation by both phase and amplitude modulation with metasurfaces. Adv Opt Mater, 4, 1230-1235(2016).
[59] J J Jin, M B Pu, Y Q Wang, X Li, X L Ma et al. Multi-channel vortex beam generation by simultaneous amplitude and phase modulation with two-dimensional metamaterial. Adv Mater Technol, 2, 1600201(2017).
[60] G Y Lee, G Yoon, S Y Lee, H Yun, J Cho et al. Complete amplitude and phase control of light using broadband holographic metasurfaces. Nanoscale, 10, 4237-4245(2018).
[61] Y Zhou, , I I, H Wang, H Y Zheng, G Gu et al. Multifunctional metaoptics based on bilayer metasurfaces. Light Sci Appl, 8, 80(2019).
[62] A C Overvig, S Shrestha, S C Malek, M Lu, A Stein et al. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light Sci Appl, 8, 92(2019).
[64] W M Hao, M Deng, S Q Chen, L Chen. High-efficiency generation of airy beams with Huygens' metasurface. Phys Rev Appl, 11, 054012(2019).
[65] N K Grady, J E Heyes, D R Chowdhury, Y Zeng, M T Reiten et al. Terahertz metamaterials for linear polarization conversion and anomalous refraction. Science, 340, 1304-1307(2013).
[66] Y M Yang, W Y Wang, P Moitra, I I Kravchenko, D P Briggs et al. Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation. Nano Lett, 14, 1394-1399(2014).
[67] L Q Cong, N N Xu, J Q Gu, R Singh, J G Han et al. Highly flexible broadband terahertz metamaterial quarter-wave plate. Laser Photonics Rev, 8, 626-632(2014).
[68] F Ding, Z X Wang, S L He, V M Shalaev, A V Kildishev. Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach. ACS Nano, 9, 4111-4119(2015).
[69] W W Liu, S Q Chen, Z C Li, H Cheng, P Yu et al. Realization of broadband cross-polarization conversion in transmission mode in the terahertz region using a single-layer metasurface. Opt Lett, 40, 3185-3188(2015).
[70] Z C Liu, Z C Li, Z Liu, H Cheng, W W Liu et al. Single-layer plasmonic metasurface half-wave plates with wavelength-independent polarization conversion angle. ACS Photonics, 4, 2061-2069(2017).
[71] S Wu, Z Zhang, Y Zhang, K Y Zhang, L Zhou et al. Enhanced rotation of the polarization of a light beam transmitted through a silver film with an array of perforated S-shaped holes. Phys Rev Lett, 110, 207401(2013).
[72] R H Fan, Y Zhou, X P Ren, R W Peng, S C Jiang et al. Freely tunable broadband polarization rotator for terahertz waves. Adv Mater, 27, 1201-1206(2015).
[73] C Pfeiffer, A Grbic. Controlling vector Bessel beams with metasurfaces. Phys Rev Appl, 2, 044012(2014).
[74] F Y Yue, D D Wen, J T Xin, B D Gerardot, J S Li et al. Vector vortex beam generation with a single plasmonic metasurface. ACS Photonics, 3, 1558-1563(2016).
[75] R Z Zuo, W W Liu, H Cheng, S Q Chen, J G Tian. Breaking the diffraction limit with radially polarized light based on dielectric metalenses. Adv Opt Mater, 6, 1800795(2018).
[76] N F Yu, F Aieta, P Genevet, M A Kats, Z Gaburro et al. A broadband, background-free quarter-wave plate based on plasmonic metasurfaces. Nano Lett, 12, 6328-6333(2012).
[77] A Shaltout, J J Liu, V M Shalaev, A V Kildishev. Optically active metasurface with non-chiral plasmonic nanoantennas. Nano Lett, 14, 4426-4431(2014).
[78] P Yu, J X Li, C C Tang, H Cheng, Z C Liu et al. Controllable optical activity with non-chiral plasmonic metasurfaces. Light Sci Appl, 5, e16096(2016).
[79] P C Wu, W Y Tsai, W T Chen, Y W Huang, T Y Chen et al. Versatile polarization generation with an aluminum plasmonic metasurface. Nano Lett, 17, 445-452(2017).
[80] D D Wen, F Y Yue, C M Zhang, X F Zang, H G Liu et al. Plasmonic metasurface for optical rotation. Appl Phys Lett, 111, 023102(2017).
[81] H F Ma, Y Q Liu, K Luan, T J Cui. Multi-beam reflections with flexible control of polarizations by using anisotropic metasurfaces. Sci Rep, 6, 39390(2016).
[82] T Y Li, L L Huang, J Liu, Y T Wang, T Zentgraf. Tunable wave plate based on active plasmonic metasurfaces. Opt Express, 25, 4216-4226(2017).
[83] J X Li, S Q Chen, H F Yang, J J Li, P Yu et al. Simultaneous control of light polarization and phase distributions using plasmonic metasurfaces. Adv Funct Mater, 25, 704-710(2015).
[84] P Yu, S Q Chen, J X Li, H Cheng, Z C Li et al. Generation of vector beams with arbitrary spatial variation of phase and linear polarization using plasmonic metasurfaces. Opt Lett, 40, 3229-3232(2015).
[85] A Arbabi, Y Horie, M Bagheri, A Faraon. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat Nanotechnol, 10, 937-943(2015).
[86] C Pfeiffer, A Grbic. Cascaded metasurfaces for complete phase and polarization control. Appl Phys Lett, 102, 231116(2013).
[87] Z L Deng, J H Deng, X Zhuang, S Wang, K F Li et al. Diatomic metasurface for vectorial holography. Nano Lett, 18, 2885-2892(2018).
[88] M Khorasaninejad, A Ambrosio, P Kanhaiya, F Capasso. Broadband and chiral binary dielectric meta-holograms. Sci Adv, 2, e1501258(2016).
[89] D D Wen, F Y Yue, G X Li, G X Zheng, K Chan et al. Helicity multiplexed broadband metasurface holograms. Nat Commun, 6, 8241(2015).
[90] E Maguid, I Yulevich, D Veksler, V Kleiner, M L Brongersma et al. Photonic spin-controlled multifunctional shared-aperture antenna array. Science, 352, 1202-1206(2016).
[91] T Cai, S W Tang, G M Wang, H X Xu, S L Sun et al. High-performance bifunctional metasurfaces in transmission and reflection geometries. Adv Opt Mater, 5, 1600506(2017).
[92] F Y Yue, D D Wen, C M Zhang, B D Gerardot, W Wang et al. Multichannel polarization-controllable superpositions of orbital angular momentum states. Adv Mater, 29, 1603838(2017).
[93] J X Zhou, H L Qian, G W Hu, H L Luo, S C Wen et al. Broadband photonic spin hall meta-lens. ACS Nano, 12, 82-88(2018).
[94] H Markovich, II Shishkin, N Hendler, P Ginzburg. Optical manipulation along an optical axis with a polarization sensitive meta-lens. Nano Lett, 18, 5024-5029(2018).
[95] J P B Mueller, N A Rubin, R C Devlin, B Groever, F Capasso. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization. Phys Rev Lett, 118, 113901(2017).
[96] D P Wang, Y Hwang, Y M Dai, G Y Si, S B Wei et al. Broadband high-efficiency chiral splitters and holograms from dielectric nanoarc metasurfaces. Small, 15, 1900483(2019).
[97] Z L Deng, J H Deng, X Zhuang, S Wang, T Shi et al. Facile metagrating holograms with broadband and extreme angle tolerance. Light Sci Appl, 7, 78(2018).
[98] W T Chen, K Y Yang, C M Wang, Y W Huang, G Sun et al. High-efficiency broadband meta-hologram with polarization-controlled dual images. Nano Lett, 14, 225-230(2014).
[99] Y Montelongo, J O Tenorio-Pearl, W I Milne, T D Wilkinson. Polarization switchable diffraction based on subwavelength plasmonic nanoantennas. Nano Lett, 14, 294-298(2014).
[100] R C Devlin, A Ambrosio, N A Rubin, J P B Mueller, F Capasso. Arbitrary spin-to-orbital angular momentum conversion of light. Science, 358, 896-901(2017).
[101] Y W Huang, N A Rubin, A Ambrosio, Z J Shi, R C Devlin et al. Versatile total angular momentum generation using cascaded J-plates. Opt Express, 27, 7469-7484(2019).
[102] E Karimi, S A Schulz, I De Leon, H Qassim, J Upham et al. Generating optical orbital angular momentum at visible wavelengths using a plasmonic metasurface. Light Sci Appl, 3, e167(2014).
[103] S M Chen, Y Cai, G X Li, S Zhang, K W Cheah. Geometric metasurface fork gratings for vortex-beam generation and manipulation. Laser Photonics Rev, 10, 322-326(2016).
[104] Y H Guo, M B Pu, Z Y Zhao, Y Q Wang, J Jin et al. Merging geometric phase and plasmon retardation phase in continuously shaped metasurfaces for arbitrary orbital angular momentum generation. ACS Photonics, 3, 2022-2029(2016).
[105] H Zhao, B G Quan, X K Wang, C Z Gu, J J Li et al. Demonstration of orbital angular momentum multiplexing and demultiplexing based on a metasurface in the Terahertz Band. ACS Photonics, 5, 1726-1732(2018).
[106] D Veksler, E Maguid, N Shitrit, D Ozeri, V Kleiner et al. Multiple wavefront shaping by metasurface based on mixed random antenna groups. ACS Photonics, 2, 661-667(2015).
[107] J W Zeng, L Li, X D Yang, J Gao. Generating and separating twisted light by gradient-rotation split-ring antenna metasurfaces. Nano Lett, 16, 3101-3108(2016).
[108] Y Li, X Li, L W Chen, M B Pu, J J Jin et al. Orbital angular momentum multiplexing and demultiplexing by a single metasurface. Adv Opt Mater, 5, 1600502(2017).
[109] S Wang, F J Li, J H Deng, X Ye, Z L Deng et al. Diatomic metasurface based broadband J-plate for arbitrary spin-to-orbital conversion. J Phys D: Appl Phys, 52, 324002(2019).
[110] C Menzel, C Helgert, C Rockstuhl, E B Kley, A Tunnermann et al. Asymmetric transmission of linearly polarized light at optical metamaterials. Phys Rev Lett, 104, 253902(2010).
[111] C Huang, Y J Feng, J M Zhao, Z B Wang, T Jiang. Asymmetric electromagnetic wave transmission of linear polarization via polarization conversion through chiral metamaterial structures. Phys Rev B, 85, 195131(2012).
[112] G Kenanakis, A Xomalis, A Selimis, M Vamvakaki, M Farsari et al. Three-dimensional infrared metamaterial with asymmetric transmission. ACS Photonics, 2, 287-294(2015).
[113] M Mutlu, A E Akosman, A E Serebryannikov, E Ozbay. Diodelike asymmetric transmission of linearly polarized waves using magnetoelectric coupling and electromagnetic wave tunneling. Phys Rev Lett, 108, 213905(2012).
[114] C Pfeiffer, C Zhang, V Ray, L J Guo, A Grbic. High performance bianisotropic metasurfaces: asymmetric transmission of light. Phys Rev Lett, 113, 023902(2014).
[115] C Zhang, C Pfeiffer, T Jang, V Ray, M Junda et al. Breaking Malus' law: Highly efficient, broadband, and angular robust asymmetric light transmitting metasurface. Laser Photonics Rev, 10, 791-798(2016).
[116] Z C Li, S Q Chen, C C Tang, W W Liu, H Cheng et al. Broadband diodelike asymmetric transmission of linearly polarized light in ultrathin hybrid metamaterial. Appl Phys Lett, 105, 201103(2014).
[117] Z C Li, S Q Chen, W W Liu, H Cheng, Z C Liu et al. High performance broadband asymmetric polarization conversion due to polarization-dependent reflection. Plasmonics, 10, 1703-1711(2015).
[118] R N Ji, S W Wang, X X Liu, X S Chen, W Lu. Broadband circular polarizers constructed using helix-like chiral metamaterials. Nanoscale, 8, 14725-14729(2016).
[119] Y Zhao, J W Shi, L Y Sun, X Q Li, A Alù. Alignment-free three-dimensional optical metamaterials. Adv Mater, 26, 1439-1445(2014).
[120] A S Karimullah, C Jack, R Tullius, V M Rotello, G Cooke et al. Disposable plasmonics: plastic templated plasmonic metamaterials with tunable chirality. Adv Mater, 27, 5610-5616(2015).
[121] A B Khanikaev, N Arju, Z Fan, D Purtseladze, F Lu et al. Experimental demonstration of the microscopic origin of circular dichroism in two-dimensional metamaterials. Nat Commun, 7, 12045(2016).
[122] S P Rodrigues, S F Lan, L Kang, Y H Cui, P W Panuski et al. Intensity-dependent modulation of optically active signals in a chiral metamaterial. Nat Commun, 8, 14602(2017).
[123] M K Liu, D A Powell, R Guo, I V Shadrivov, Y S Kivshar. Polarization-induced chirality in metamaterials via optomechanical interaction. Adv Opt Mater, 5, 1600760(2017).
[124] S Y Yang, Z Liu, S Hu, A Z Jin, H F Yang et al. Spin-selective transmission in chiral folded metasurfaces. Nano Lett, 19, 3432-3439(2019).
[125] X F Zang, F L Dong, F Y Yue, C M Zhang, L H Xu et al. Polarization encoded color image embedded in a dielectric metasurface. Adv Mater, 30, 1707499(2018).
[127] C Menzel, C Rockstuhl, F Lederer. Advanced Jones calculus for the classification of periodic metamaterials. Phys Rev A, 82, 053811(2010).
[128] J H Shi, H F Ma, C Y Guan, Z P Wang, T J Cui. Broadband chirality and asymmetric transmission in ultrathin 90°-twisted Babinet-inverted metasurfaces. Phys Rev B, 89, 165128(2014).
[129] N Parappurath, F Alpeggiani, L Kuipers, E Verhagen. The origin and limit of asymmetric transmission in chiral resonators. ACS Photonics, 4, 884-890(2017).
[130] C Pfeiffer, A Grbic. Bianisotropic metasurfaces for optimal polarization control: analysis and synthesis. Phys Rev Appl, 2, 044011(2014).
[131] Z F Li, M Mutlu, E Ozbay. Chiral metamaterials: from optical activity and negative refractive index to asymmetric transmission. J Opt, 15, 023001(2013).
[132] Z J Wang, F Cheng, T Winsor, Y M Liu. Optical chiral metamaterials: a review of the fundamentals, fabrication methods and applications. Nanotechnology, 27, 412001(2016).
[133] M Qiu, L Zhang, Z X Tang, W Jin, C W Qiu et al. 3D metaphotonic nanostructures with intrinsic chirality. Adv Funct Mater, 28, 1803147(2018).
[134] V E Bochenkov, T I Shabatina. Chiral plasmonic biosensors. Biosensors, 8, 120(2018).
[135] C Helgert, E Pshenay-Severin, M Falkner, C Menzel, C Rockstuhl et al. Chiral metamaterial composed of three-dimensional plasmonic nanostructures. Nano Lett, 11, 4400-4404(2011).
[136] M Hentschel, M Schäferling, B Metzger, H Giessen. Plasmonic diastereomers: adding up chiral centers. Nano Lett, 13, 600-606(2013).
[137] X H Yin, M Schäferling, B Metzger, H Giessen. Interpreting chiral nanophotonic spectra: the plasmonic Born-Kuhn model. Nano Lett, 13, 6238-6243(2013).
[138] M Hentschel, V E Ferry, A P Alivisatos. Optical rotation reversal in the optical response of chiral plasmonic nanosystems: the role of plasmon hybridization. ACS Photonics, 2, 1253-1259(2015).
[139] Z J Wang, H Jia, K Yao, W S Cai, H S Chen et al. Circular dichroism metamirrors with near-perfect extinction. ACS Photonics, 3, 2096-2101(2016).
[140] M Hentschel, L Wu, M Schäferling, P Bai, E P Li et al. Optical properties of chiral three-dimensional plasmonic oligomers at the onset of charge-transfer plasmons. ACS Nano, 6, 10355-10365(2012).
[141] M Kenney, S X Li, X Q Zhang, X Q Su, T T Kim et al. Pancharatnam-berry phase induced spin-selective transmission in herringbone dielectric metamaterials. Adv Mater, 28, 9567-9572(2016).
[142] C Wu, N Arju, G Kelp, J A Fan, J Dominguez et al. Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances. Nat Commun, 5, 3892(2014).
[143] W M Ye, X D Yuan, C C Guo, J F Zhang, B Yang et al. Large chiroptical effects in planar chiral metamaterials. Phys Rev Appl, 7, 054003(2017).
[144] J F Zhou, D R Chowdhury, R K Zhao, A K Azad, H T Chen et al. Terahertz chiral metamaterials with giant and dynamically tunable optical activity. Phys Rev B, 86, 035448(2012).
[145] A V Rogacheva, V A Fedotov, A S Schwanecke, N I Zheludev. Giant gyrotropy due to electromagnetic-field coupling in a bilayered chiral structure. Phys Rev Lett, 97, 177401(2006).
[146] Y H Cui, L Kang, S F Lan, S Rodrigues, W S Cai. Giant chiral optical response from a twisted-arc metamaterial. Nano Lett, 14, 1021-1025(2014).
[147] S Fasold, S Linß, T Kawde, M Falkner, M Decker et al. Disorder-enabled pure chirality in bilayer plasmonic metasurfaces. ACS Photonics, 5, 1773-1778(2018).
[148] A Y Zhu, W T Chen, A Zaidi, Y W Huang, M Khorasaninejad et al. Giant intrinsic chiro-optical activity in planar dielectric nanostructures. Light Sci Appl, 7, 17158(2018).
[149] B Hopkins, A N Poddubny, A E Miroshnichenko, Y S Kivshar. Circular dichroism induced by Fano resonances in planar chiral oligomers. Laser Photonics Rev, 10, 137-146(2016).
[150] D N Ma, Z C Li, Y B Zhang, W W Liu, H Cheng et al. Giant spin-selective asymmetric transmission in multipolar-modulated metasurfaces. Opt Lett, 44, 3805-3808(2019).
[151] J Y Liu, Z C Li, W W Liu, H Cheng, S Q Chen et al. High-efficiency mutual dual-band asymmetric transmission of circularly polarized waves with few-layer anisotropic metasurfaces. Adv Opt Mater, 4, 2028-2034(2016).
[152] Z C Li, W W Liu, H Cheng, S Q Chen, J G Tian. Tunable dual-band asymmetric transmission for circularly polarized waves with graphene planar chiral metasurfaces. Opt Lett, 41, 3142-3145(2016).
[153] Y Chen, J Gao, X D Yang. Direction-controlled bifunctional metasurface polarizers. Laser Photonics Rev, 12, 1800198(2018).
[154] Y Chen, X D Yang, J Gao. 3D Janus plasmonic helical nanoapertures for polarization-encrypted data storage. Light Sci Appl, 8, 45(2019).
[155] Y Zhao, M A Belkin, A Alù. Twisted optical metamaterials for planarized ultrathin broadband circular polarizers. Nat Commun, 3, 870(2012).
[156] Y Zhao, A N Askarpour, L Y Sun, J W Shi, X Q Li et al. Chirality detection of enantiomers using twisted optical metamaterials. Nat Commun, 8, 14180(2017).
[157] W W Wan, J Gao, X D Yang. Full-color plasmonic metasurface holograms. ACS Nano, 10, 10671-10680(2016).
[158] B Wang, F L Dong, Q T Li, D Yang, C W Sun et al. Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms. Nano Lett, 16, 5235-5240(2016).
[159] Y Q Hu, X H Luo, Y Q Chen, Q Liu, X Li et al. 3D-Integrated metasurfaces for full-colour holography. Light Sci Appl, 8, 86(2019).
[160] X H Zhang, M B Pu, Y H Guo, J J Jin, X Li et al. Colorful metahologram with independently controlled images in transmission and reflection spaces. Adv Funct Mater, 29, 1809145(2019).
[161] Q S Wei, B Sain, Y T Wang, B Reineke, X W Li et al. Simultaneous spectral and spatial modulation for color printing and holography using all-dielectric metasurfaces. Nano Lett, 19, 8964-8971(2019).
[162] M Khorasaninejad, F Aieta, P Kanhaiya, M A Kats, P Genevet et al. Achromatic metasurface lens at telecommunication wavelengths. Nano Lett, 15, 5358-5362(2015).
[163] F Aieta, M A Kats, P Genevet, F Capasso. Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science, 347, 1342-1345(2015).
[164] J T Hu, C H Liu, X C Ren, L J Lauhon, T W Odom. Plasmonic lattice lenses for multiwavelength achromatic focusing. ACS Nano, 10, 10275-10282(2016).
[165] E Arbabi, A Arbabi, S M Kamali, Y Horie, A Faraon. Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules. Optica, 3, 628-633(2016).
[166] O Avayu, E Almeida, Y Prior, T Ellenbogen. Composite functional metasurfaces for multispectral achromatic optics. Nat Commun, 8, 14992(2017).
[167] G H Yuan, E T Rogers, N I Zheludev. Achromatic super-oscillatory lenses with sub-wavelength focusing. Light Sci Appl, 6, e17036(2017).
[168] Y Zhou, II Kravchenko, H Wang, J R Nolen, G Gu et al. Multilayer noninteracting dielectric metasurfaces for multiwavelength metaoptics. Nano Lett, 18, 7529-7537(2018).
[169] Z J Shi, M Khorasaninejad, Y W Huang, C Roques-Carmes, A Y Zhu et al. Single-layer metasurface with controllable multiwavelength functions. Nano Lett, 18, 2420-2427(2018).
[170] M Khorasaninejad, W T Chen, J Oh, F Capasso. Super-dispersive off-axis meta-lenses for compact high resolution spectroscopy. Nano Lett, 16, 3732-3737(2016).
[171] E Arbabi, A Arbabi, S M Kamali, Y Horie, A Faraon. Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces. Optica, 4, 625-632(2017).
[172] G X Li, S M Chen, N Pholchai, B Reineke, P W Wong et al. Continuous control of the nonlinearity phase for harmonic generations. Nat Mater, 14, 607-612(2015).
[173] O Wolf, S Campione, A Benz, A P Ravikumar, S Liu et al. Phased-array sources based on nonlinear metamaterial nanocavities. Nat Commun, 6, 7667(2015).
[174] N Segal, S Keren-Zur, N Hendler, T Ellenbogen. Controlling light with metamaterial-based nonlinear photonic crystals. Nat Photonics, 9, 180-184(2015).
[175] E Almeida, G Shalem, Y Prior. Subwavelength nonlinear phase control and anomalous phase matching in plasmonic metasurfaces. Nat Commun, 7, 10367(2016).
[176] M Tymchenko, J S Gomez-Diaz, J Lee, N Nookala, M A Belkin et al. Advanced control of nonlinear beams with Pancharatnam-Berry metasurfaces. Phys Rev B, 94, 214303(2016).
[177] S M Chen, G X Li, K W Cheah, T Zentgraf, S Zhang. Controlling the phase of optical nonlinearity with plasmonic metasurfaces. Nanophotonics, 7, 1013-1024(2018).
[178] S M Chen, G X Li, F Zeuner, W H Wong, E Y B Pun et al. Symmetry-selective third-harmonic generation from plasmonic metacrystals. Phys Rev Lett, 113, 033901(2014).
[179] K Konishi, T Higuchi, J Li, J Larsson, S Ishii et al. Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry. Phys Rev Lett, 112, 135502(2014).
[180] C Schlickriede, N Waterman, B Reineke, P Georgi, G X Li et al. Imaging through nonlinear metalens using second harmonic generation. Adv Mater, 30, 1703843(2018).
[181] J Bar-David, U Levy. Nonlinear diffraction in asymmetric dielectric metasurfaces. Nano Lett, 19, 1044-1051(2019).
[182] G X Li, G Sartorello, S M Chen, L H Nicholls, K F Li et al. Spin and geometric phase control four-wave mixing from metasurfaces. Laser Photonics Rev, 12, 1800034(2018).
[183] E Almeida, O Bitton, Y Prior. Nonlinear metamaterials for holography. Nat Commun, 7, 12533(2016).
[184] W M Ye, F Zeuner, X Li, B Reineke, S He et al. Spin and wavelength multiplexed nonlinear metasurface holography. Nat Commun, 7, 11930(2016).
[185] G X Li, L Wu, K F Li, S M Chen, C Schlickriede et al. Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation. Nano Lett, 17, 7974-7979(2017).
[186] Z Li, W W Liu, Z C Li, C C Tang, H Cheng et al. Tripling the capacity of optical vortices by nonlinear metasurface. Laser Photonics Rev, 12, 1800164(2018).
[187] M L Ma, Z Li, W W Liu, C C Tang, Z C Li et al. Optical information multiplexing with nonlinear coding metasurfaces. Laser Photonics Rev, 13, 1900045(2019).
[188] N Nookala, J Lee, M Tymchenko, Gomez-Diaz J Sebastian, F Demmerle et al. Ultrathin gradient nonlinear metasurface with a giant nonlinear response. Optica, 3, 283-288(2016).
[189] P Georgi, C Schlickriede, G X Li, S Zhang, T Zentgraf. Rotational Doppler shift induced by spin-orbit coupling of light at spinning metasurfaces. Optica, 4, 1000-1005(2017).
[190] G X Li, T Zentgraf, S Zhang. Rotational Doppler effect in nonlinear optics. Nat Phys, 12, 736-740(2016).
[191] R Czaplicki, H Husu, R Siikanen, J Mäkitalo, M Kauranen et al. Enhancement of second-harmonic generation from metal nanoparticles by passive elements. Phys Rev Lett, 110, 093902(2013).
[192] J Lee, M Tymchenko, C Argyropoulos, P Y Chen, F Lu et al. Giant nonlinear response from plasmonic metasurfaces coupled to intersubband transitions. Nature, 511, 65-69(2014).
[193] M Celebrano, X F Wu, M Baselli, S Großmann, P Biagioni et al. Mode matching in multiresonant plasmonic nanoantennas for enhanced second harmonic generation. Nat Nanotechnol, 10, 412-417(2015).
[194] Z Li, W W Liu, Z C Li, H Cheng, S Q Chen et al. Fano-resonance-based mode-matching hybrid metasurface for enhanced second-harmonic generation. Opt Lett, 42, 3117-3120(2017).
[195] S Liu, M B Sinclair, S Saravi, G A Keeler, Y M Yang et al. Resonantly enhanced second-harmonic generation using III-V semiconductor all-dielectric metasurfaces. Nano Lett, 16, 5426-5432(2016).
[196] Y M Yang, W Y Wang, A Boulesbaa, II Kravchenko, D P Briggs et al. Nonlinear fano-resonant dielectric metasurfaces. Nano Lett, 15, 7388-7393(2015).
[197] S M Chen, M Rahmani, K F Li, A Miroshnichenko, T Zentgraf et al. Third harmonic generation enhanced by multipolar interference in complementary silicon metasurfaces. ACS Photonics, 5, 1671-1675(2018).
[198] K Koshelev, Y T Tang, K F Li, D Y Choi, G X Li et al. Nonlinear metasurfaces governed by bound states in the continuum. ACS Photonics, 6, 1639-1644(2019).
[199] S M Chen, B Reineke, G X Li, T Zentgraf, S Zhang. Strong nonlinear optical activity induced by lattice surface modes on plasmonic metasurface. Nano Lett, 19, 6278-6283(2019).
[200] S M Chen, F Zeuner, M Weismann, B Reineke, G X Li et al. Giant nonlinear optical activity of achiral origin in planar metasurfaces with quadratic and cubic nonlinearities. Adv Mater, 28, 2992-2999(2016).
[201] L H Nicholls, F J Rodríguez-Fortuño, M E Nasir, R M Córdova-Castro, N Olivier et al. Ultrafast synthesis and switching of light polarization in nonlinear anisotropic metamaterials. Nat Photonics, 11, 628-633(2017).
[202] G Sartorello, N Olivier, J J Zhang, W S Yue, D J Gosztola et al. Ultrafast optical modulation of second- and third-harmonic generation from cut-disk-based metasurfaces. ACS Photonics, 3, 1517-1522(2016).
[203] S Keren-Zur, M Tal, S Fleischer, D M Mittleman, T Ellenbogen. Generation of spatiotemporally tailored terahertz wavepackets by nonlinear metasurfaces. Nat Commun, 10, 1778(2019).
[204] M Yang, P Sheng. Sound absorption structures: from porous media to acoustic metamaterials. Annu Rev Mater Res, 47, 83-114(2017).
[205] G C Ma, M Yang, S W Xiao, Z Y Yang, P Sheng. Acoustic metasurface with hybrid resonances. Nat Mater, 13, 873-878(2014).
[206] M Yang, C Meng, C X Fu, Y Li, Z Y Yang et al. Subwavelength total acoustic absorption with degenerate resonators. Appl Phys Lett, 107, 104104(2015).
[207] N Jiménez, W Huang, V Romero-García, V Pagneux, J P Groby. Ultra-thin metamaterial for perfect and quasi-omnidirectional sound absorption. Appl Phys Lett, 109, 121902(2016).
[208] N Jiménez, V Romero-García, V Pagneux, J P Groby. Quasiperfect absorption by subwavelength acoustic panels in transmission using accumulation of resonances due to slow sound. Phys Rev B, 95, 014205(2017).
[209] X Jiang, B Liang, R Q Li, X Y Zou, L L Yin et al. Ultra-broadband absorption by acoustic metamaterials. Appl Phys Lett, 105, 243505(2014).
[210] M Yang, S Y Chen, C X Fu, P Sheng. Optimal sound-absorbing structures. Mater Horiz, 4, 673-680(2017).
[211] SA Cummer, J Christensen, A Alù. Controlling sound with acoustic metamaterials. Nat Rev Mater, 1, 16001(2016).
[212] T J Cui, M Q Qi, X Wan, J Zhao, Q Cheng. Coding metamaterials, digital metamaterials and programmable metamaterials. Light Sci Appl, 3, e218(2014).
[213] B Y Xie, K Tang, H Cheng, Z Y Liu, S Q Chen et al. Coding acoustic metasurfaces. Adv Mater, 29, 1603507(2017).
[214] N F Yu, P Genevet, M A Kats, F Aieta, J P Tetienne et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science, 334, 333-337(2011).
[215] Y Li, B Liang, Z M Gu, X Y Zou, J C Cheng. Reflected wavefront manipulation based on ultrathin planar acoustic metasurfaces. Sci Rep, 3, 2546(2013).
[216] Y B Xie, W Q Wang, H Y Chen, A Konneker, B I Popa et al. Wavefront modulation and subwavelength diffractive acoustics with an acoustic metasurface. Nat Commun, 5, 5553(2014).
[217] Y Li, X Jiang, R Q Li, B Liang, X Y Zou et al. Experimental realization of full control of reflected waves with subwavelength acoustic metasurfaces. Phys Rev Appl, 2, 064002(2014).
[218] J J Zhao, B W Li, Z N Chen, C W Qiu. Redirection of sound waves using acoustic metasurface. Appl Phys Lett, 103, 151604(2013).
[219] C L Ding, H J Chen, S L Zhai, S Liu, X P Zhao. The anomalous manipulation of acoustic waves based on planar metasurface with split hollow sphere. J Phys D: Appl Phys, 48, 045303(2015).
[221] J Mei, Y Wu. Controllable transmission and total reflection through an impedance-matched acoustic metasurface. New J Phys, 16, 123007(2014).
[222] B Y Xie, H Cheng, K Tang, Z Y Liu, S Q Chen et al. Multiband asymmetric transmission of airborne sound by coded metasurfaces. Phys Rev Appl, 7, 024010(2017).
[223] Y Li, C Shen, Y B Xie, J F Li, W Q Wang et al. Tunable asymmetric transmission via lossy acoustic metasurfaces. Phys Rev Lett, 119, 035501(2017).
[224] C Z Shi, M Dubois, Y Wang, X Zhang. High-speed acoustic communication by multiplexing orbital angular momentum. Proc Natl Acad Sci USA, 114, 7250-7253(2017).
[225] K Song, J Kim, S Hur, J H Kwak, S H Lee et al. Directional reflective surface formed via gradient-impeding acoustic meta-surfaces. Sci Rep, 6, 32300(2016).
[226] Y F Zhu, J Hu, X D Fan, J Yang, B Liang et al. Fine manipulation of sound via lossy metamaterials with independent and arbitrary reflection amplitude and phase. Nat Commun, 9, 1632(2018).
[227] Y Tian, Q Wei, Y Cheng, X J Liu. Acoustic holography based on composite metasurface with decoupled modulation of phase and amplitude. Appl Phys Lett, 110, 191901(2017).
[228] R Fleury, D L Sounas, C F Sieck, M R Haberman, A Alù. Sound isolation and giant linear nonreciprocity in a compact acoustic circulator. Science, 343, 516-519(2014).
[229] Z J Yang, F Gao, X H Shi, X Lin, Z Gao et al. Topological acoustics. Phys Rev Lett, 114, 114301(2015).
[230] X Ni, C He, X C Sun, X P Liu, M H Lu et al. Topologically protected one-way edge mode in networks of acoustic resonators with circulating air flow. New J Phys, 17, 053016(2015).
[231] Y J Ding, Y G Peng, Y F Zhu, X D Fan, J Yang et al. Experimental demonstration of acoustic chern insulators. Phys Rev Lett, 122, 014302(2019).
[232] L H Wu, X Hu. Scheme for achieving a topological photonic crystal by using dielectric material. Phys Rev Lett, 114, 223901(2015).
[233] C He, X Ni, H Ge, X C Sun, Y B Chen et al. Acoustic topological insulator and robust one-way sound transport. Nat Phys, 12, 1124-1129(2016).
[234] J Y Lu, C Y Qiu, L P Ye, X Y Fan, M Z Ke et al. Observation of topological valley transport of sound in sonic crystals. Nat Phys, 13, 369-374(2017).
[235] J Y Lu, C Y Qiu, M Z Ke, Z Y Liu. Valley vortex states in sonic crystals. Phys Rev Lett, 116, 093901(2016).
[236] J Y Lu, C Y Qiu, W Y Deng, X Q Huang, F Li et al. Valley topological phases in bilayer sonic crystals. Phys Rev Lett, 120, 116802(2018).
[237] M Xiao, W J Chen, W Y He, C T Chan. Synthetic gauge flux and Weyl points in acoustic systems. Nat Phys, 11, 920-924(2015).
[238] F Li, X Q Huang, J Y Lu, J H Ma, Z Y Liu. Weyl points and Fermi arcs in a chiral phononic crystal. Nat Phys, 14, 30-34(2018).
[239] B Y Xie, H Liu, H Cheng, Z Y Liu, S Q Chen et al. Experimental realization of type-II Weyl points and Fermi arcs in phononic crystal. Phys Rev Lett, 122, 104302(2019).
[240] Y H Yang, H X Sun, J P Xia, H R Xue, Z Gao et al. Topological triply degenerate point with double Fermi arcs. Nat Phys, 15, 645-649(2019).
[241] X J Zhang, H X Wang, Z K Lin, Y Tian, B Y Xie et al. Second-order topology and multidimensional topological transitions in sonic crystals. Nat Phys, 15, 582-588(2019).
[242] H R Xue, Y H Yang, F Gao, Y D Chong, B L Zhang. Acoustic higher-order topological insulator on a kagome lattice. Nat Mater, 18, 108-112(2019).
[243] Z W Zhang, H Y Long, C Liu, C Shao, Y Cheng et al. Deep-subwavelength holey acoustic second-order topological insulators. Adv Mater, 31, 1904682(2019).
[244] H Y Fan, B Z Xia, L Tong, S J Zheng, D J Yu. Elastic higher-order topological insulator with topologically protected corner states. Phys Rev Lett, 122, 204301(2019).
[245] M Ezawa. Higher-order topological insulators and semimetals on the breathing kagome and pyrochlore lattices. Phys Rev Lett, 120, 026801(2018).
[246] W A Benalcazar, B A Bernevig, T L Hughes. Quantized electric multipole insulators. Science, 357, 61-66(2017).
[247] R D King-Smith, D Vanderbilt. Theory of polarization of crystalline solids. Phys Rev B, 47, 1651-1654(1993).
[248] M Serra-Garcia, V Peri, R Süsstrunk, O R Bilal, T Larsen et al. Observation of a phononic quadrupole topological insulator. Nature, 555, 342-345(2018).
[249] Hedayati M Keshavarz, M Elbahri. Review of metasurface plasmonic structural color. Plasmonics, 12, 1463-1479(2017).
[250] T Lee, J Jang, H Jeong, J Rho. Plasmonic- and dielectric-based structural coloring: from fundamentals to practical applications. Nano Converg, 5, 1(2018).
[251] B Yang, H Cheng, S Q Chen, J G Tian. Structural colors in metasurfaces: principle, design and applications. Mater Chem Front, 3, 750-761(2019).
[252] S J Tan, L Zhang, D Zhu, X M Goh, Y M Wang et al. Plasmonic color palettes for photorealistic printing with aluminum nanostructures. Nano Lett, 14, 4023-4029(2014).
[253] Z Y Li, S Butun, K Aydin. Large-area, lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films. ACS Photonics, 2, 183-188(2015).
[254] K Kumar, H G Duan, R S Hegde, S C W Koh, J N Wei et al. Printing colour at the optical diffraction limit. Nat Nanotechnol, 7, 557-561(2012).
[255] Z B Li, A W Clark, J M Cooper. Dual color plasmonic pixels create a polarization controlled nano color palette. ACS Nano, 10, 492-498(2016).
[256] E Heydari, J R Sperling, S L Neale, A W Clark. Plasmonic color filters as dual-state nanopixels for high-density microimage encoding. Adv Funct Mater, 27, 1701866(2017).
[257] P Dai, Y S Wang, X P Zhu, H M Shi, Y Q Chen et al. Transmissive structural color filters using vertically coupled aluminum nanohole/nanodisk array with a triangular-lattice. Nanotechnology, 29, 395202(2018).
[258] S Sun, Z X Zhou, C Zhang, Y S Gao, Z H Duan et al. All-dielectric full-color printing with TiO2 metasurfaces. ACS Nano, 11, 4445-4452(2017).
[259] X L Zhu, W Yan, U Levy, N A Mortensen, A Kristensen. Resonant laser printing of structural colors on high-index dielectric metasurfaces. Sci Adv, 3, e1602487(2017).
[260] C S Park, V R Shrestha, W J Yue, S Gao, S S Lee et al. Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks. Sci Rep, 7, 2556(2017).
[261] Y Nagasaki, M Suzuki, I Hotta, J Takahara. Control of Si-based all-dielectric printing color through oxidation. ACS Photonics, 5, 1460-1466(2018).
[262] B Yang, W W Liu, Z C Li, H Cheng, S Q Chen et al. Polarization-sensitive structural colors with hue-and-saturation tuning based on all-dielectric nanopixels. Adv Opt Mater, 6, 1701009(2018).
[263] Y J Bao, Y Yu, H F Xu, C Guo, J T Li et al. Full-colour nanoprint-hologram synchronous metasurface with arbitrary hue-saturation-brightness control. Light Sci Appl, 8, 95(2019).
[264] K T P Lim, H L Liu, Y J Liu, J K W Yang. Holographic colour prints for enhanced optical security by combined phase and amplitude control. Nat Commun, 10, 25(2019).
[265] B Yang, W W Liu, Z C Li, H Cheng, D Y Choi et al. Ultrahighly saturated structural colors enhanced by multipolar-modulated metasurfaces. Nano Lett, 19, 4221-4228(2019).
[266] A Pors, M G Nielsen, T Bernardin, J C Weeber, S I Bozhevolnyi. Efficient unidirectional polarization-controlled excitation of surface plasmon polaritons. Light Sci Appl, 3, e197(2014).
[267] L L Huang, X Z Chen, B F Bai, Q F Tan, G F Jin et al. Helicity dependent directional surface plasmon polariton excitation using a metasurface with interfacial phase discontinuity. Light Sci Appl, 2, e70(2013).
[268] A Shaltout, J J Liu, A Kildishev, V Shalaev. Photonic spin Hall effect in gap-plasmon metasurfaces for on-chip chiroptical spectroscopy. Optica, 2, 860-863(2015).
[269] X H Ling, X X Zhou, X N Yi, W X Shu, Y C Liu et al. Giant photonic spin Hall effect in momentum space in a structured metamaterial with spatially varying birefringence. Light Sci Appl, 4, e290(2015).
[270] Z C Li, W W Liu, H Cheng, S Q Chen, J G Tian. Manipulation of the photonic spin hall effect with high efficiency in gold-nanorod-based metasurfaces. Adv Opt Mater, 5, 1700413(2017).
[271] Y C Liu, Y G Ke, H L Luo, S C Wen. Photonic spin Hall effect in metasurfaces: a brief review. Nanophotonics, 6, 51-70(2017).
[272] N Shitrit, I Bretner, Y Gorodetski, V Kleiner, E Hasman. Optical spin Hall effects in plasmonic chains. Nano Lett, 11, 2038-2042(2011).
[273] W J Luo, S Y Xiao, Q He, S L Sun, L Zhou. Photonic spin hall effect with nearly 100% efficiency. Adv Opt Mater, 3, 1102-1108(2015).
[274] W J Luo, S L Sun, H X Xu, Q He, L Zhou. Transmissive ultrathin pancharatnam-berry metasurfaces with nearly 100% efficiency. Phys Rev Appl, 7, 044033(2017).
[275] W Li, Z J Coppens, L V Besteiro, W Y Wang, A O Govorov et al. Circularly polarized light detection with hot electrons in chiral plasmonic metamaterials. Nat Commun, 6, 8379(2015).
[276] D D Wen, F Y Yue, S Kumar, Y Ma, M Chen et al. Metasurface for characterization of the polarization state of light. Opt Express, 23, 10272-10281(2015).
[277] P C Wu, J W Chen, C W Yin, Y C Lai, T L Chung et al. Visible metasurfaces for on-chip polarimetry. ACS Photonics, 5, 2568-2573(2018).
[278] A Pors, M G Nielsen, S I Bozhevolnyi. Plasmonic metagratings for simultaneous determination of Stokes parameters. Optica, 2, 716-723(2015).
[279] Mueller J P Balthasar, K Leosson, F Capasso. Ultracompact metasurface in-line polarimeter. Optica, 3, 42-47(2016).
[280] A Pors, S I Bozhevolnyi. Waveguide metacouplers for in-plane polarimetry. Phys Rev Appl, 5, 064015(2016).
[281] K Lee, H Yun, S E Mun, G Y Lee, J Sung et al. Ultracompact broadband plasmonic polarimeter. Laser Photonics Rev, 12, 1700297(2018).
[282] W T Chen, P Török, M R Foreman, C Y Liao, W Y Tsai et al. Integrated plasmonic metasurfaces for spectropolarimetry. Nanotechnology, 27, 224002(2016).
[283] F Ding, A Pors, Y T Chen, V A Zenin, S I Bozhevolnyi. Beam-size-invariant spectropolarimeters using gap-plasmon metasurfaces. ACS Photonics, 4, 943-949(2017).
[284] X Q Zhang, S M Yang, W S Yue, Q Xu, C X Tian et al. Direct polarization measurement using a multiplexed Pancharatnam-Berry metahologram. Optica, 6, 1190-1198(2019).
[285] K V Sreekanth, Y Alapan, M ElKabbash, E Ilker, M Hinczewski et al. Extreme sensitivity biosensing platform based on hyperbolic metamaterials. Nat Mater, 15, 621-627(2016).
[286] O Yavas, M Svedendahl, P Dobosz, V Sanz, R Quidant. On-a-chip biosensing based on all-dielectric nanoresonators. Nano Lett, 17, 4421-4426(2017).
[287] A Salim, S Lim. Review of recent metamaterial microfluidic sensors. Sensors, 18, 232(2018).
[288] Z Y Li, Y B Zhu, Y F Hao, M Gao, M Lu et al. Hybrid metasurface-based mid-infrared biosensor for simultaneous quantification and identification of monolayer protein. ACS Photonics, 6, 501-509(2019).
[289] B W Liu, S Chen, J C Zhang, X Yao, J H Zhong et al. A plasmonic sensor array with ultrahigh figures of merit and resonance linewidths down to 3 nm. Adv Mater, 30, 1706031(2018).
[290] Y B Zhu, Z Y Li, Z Hao, C DiMarco, P Maturavongsadit et al. Optical conductivity-based ultrasensitive mid-infrared biosensing on a hybrid metasurface. Light Sci Appl, 7, 67(2018).
[291] K V Sreekanth, S Sreejith, S Han, A Mishra, X X Chen et al. Biosensing with the singular phase of an ultrathin metal-dielectric nanophotonic cavity. Nat Commun, 9, 369(2018).
[292] Y Lee, S J Kim, H Park, B Lee. Metamaterials and metasurfaces for sensor applications. Sensors, 17, 1726(2017).
[293] B Gallinet, O J F Martin. Refractive index sensing with subradiant modes: a framework to reduce losses in plasmonic nanostructures. ACS Nano, 7, 6978-6987(2013).
[294] Y M Yang, I I Kravchenko, D P Briggs, J Valentine. All-dielectric metasurface analogue of electromagnetically induced transparency. Nat Commun, 5, 5753(2014).
[295] Y B Zhang, W W Liu, Z C Li, Z Li, H Cheng et al. High-quality-factor multiple Fano resonances for refractive index sensing. Opt Lett, 43, 1842-1845(2018).
[296] H G Liu, L Zheng, P Z Ma, Y Zhong, B Liu et al. Metasurface generated polarization insensitive Fano resonance for high-performance refractive index sensing. Opt Express, 27, 13252-13262(2019).
[297] B Luk'yanchuk, N I Zheludev, S A Maier, N J Halas, P Nordlander et al. The Fano resonance in plasmonic nanostructures and metamaterials. Nat Mater, 9, 707-715(2010).
[298] M F Limonov, M V Rybin, A N Poddubny, Y S Kivshar. Fano resonances in photonics. Nat Photonics, 11, 543-554(2017).
[299] C W Hsu, B Zhen, A D Stone, J D Joannopoulos, M Soljačić. Bound states in the continuum. Nat Rev Mater, 1, 16048(2016).
[300] K Koshelev, G Favraud, A Bogdanov, Y Kivshar, A Fratalocchi. Nonradiating photonics with resonant dielectric nanostructures. Nanophotonics, 8, 725-745(2019).
[301] M K Liu, D Y Choi. Extreme Huygens' metasurfaces based on quasi-bound states in the continuum. Nano Lett, 18, 8062-8069(2018).
[302] K Koshelev, S Lepeshov, M K Liu, A Bogdanov, Y Kivshar. Asymmetric metasurfaces with high-Q resonances governed by bound states in the continuum. Phys Rev Lett, 121, 193903(2018).
[303] A Tittl, A Leitis, M K Liu, F Yesilkoy, D Y Choi et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces. Science, 360, 1105-1109(2018).
[304] A Leitis, A Tittl, M K Liu, B H Lee, M B Gu et al. Angle-multiplexed all-dielectric metasurfaces for broadband molecular fingerprint retrieval. Sci Adv, 5, eaaw2871(2019).
[305] F Yesilkoy, E R Arvelo, Y Jahani, M K Liu, A Tittl et al. Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces. Nat Photonics, 13, 390-396(2019).
[306] Q Guo, Z J Shi, Y W Huang, E Alexander, C W Qiu et al. Compact single-shot metalens depth sensors inspired by eyes of jumping spiders. Proc Natl Acad Sci USA, 116, 22959-22965(2019).
[307] P Georgi, M Massaro, K H Luo, B Sain, N Montaut et al. Metasurface interferometry toward quantum sensors. Light Sci Appl, 8, 70(2019).
[308] F Walter, G X Li, C Meier, S Zhang, T Zentgraf. Ultrathin nonlinear metasurface for optical image encoding. Nano Lett, 17, 3171-3175(2017).
[309] Y T Tang, Y Intaravanne, J H Deng, K F Li, X Z Chen et al. Nonlinear vectorial metasurface for optical encryption. Phys Rev Appl, 12, 024028(2019).
[310] X H Zhang, M B Pu, J J Jin, X Li, P Gao et al. Helicity multiplexed spin-orbit interaction in metasurface for colorized and encrypted holographic display. Ann Phys, 529, 1700248(2017).
[311] F Y Yue, C M Zhang, X F Zang, D D Wen, B D Gerardot et al. High-resolution grayscale image hidden in a laser beam. Light Sci Appl, 7, 17129(2018).
[312] C M Zhang, F L Dong, Y Intaravanne, X F Zang, L H Xu et al. Multichannel metasurfaces for anticounterfeiting. Phys Rev Appl, 12, 034028(2019).
[313] H R Ren, G Briere, X Y Fang, P N Ni, R Sawant et al. Metasurface orbital angular momentum holography. Nat Commun, 10, 2986(2019).
[314] J X Li, S Kamin, G X Zheng, F Neubrech, S Zhang et al. Addressable metasurfaces for dynamic holography and optical information encryption. Sci Adv, 4, eaar6768(2018).
[315] X Y Duan, N Liu. Scanning plasmonic color display. ACS Nano, 12, 8817-8823(2018).
[316] M P Backlund, A Arbabi, P N Petrov, E Arbabi, S Saurabh et al. Removing orientation-induced localization biases in single-molecule microscopy using a broadband metasurface mask. Nat Photonics, 10, 459-462(2016).
[317] H Pahlevaninezhad, M Khorasaninejad, Y W Huang, Z J Shi, L P Hariri et al. Nano-optic endoscope for high-resolution optical coherence tomography in vivo. Nat Photonics, 12, 540-547(2018).
[318] S Colburn, A Zhan, A Majumdar. Metasurface optics for full-color computational imaging. Sci Adv, 4, eaar2114(2018).
[319] C Chen, W G Song, J W Chen, J H Wang, Y H Chen et al. Spectral tomographic imaging with aplanatic metalens. Light Sci Appl, 8, 99(2019).
[320] X J Ni, Z J Wong, M Mrejen, Y Wang, X Zhang. An ultrathin invisibility skin cloak for visible light. Science, 349, 1310-1314(2015).
[321] Y H Yang, L Q Jing, B Zheng, R Hao, W Y Yin et al. Full-polarization 3D metasurface cloak with preserved amplitude and phase. Adv Mater, 28, 6866-6871(2016).
[322] J Zhang, Z L Mei, W R Zhang, F Yang, T J Cui. An ultrathin directional carpet cloak based on generalized Snell's law. Appl Phys Lett, 103, 151115(2013).
[323] B Orazbayev, Estakhri N Mohammadi, A Alù, M Beruete. Experimental demonstration of metasurface-based ultrathin carpet cloaks for millimeter waves. Adv Opt Mater, 5, 1600606(2017).
[324] H C Chu, Q Li, B B Liu, J Luo, S L Sun et al. A hybrid invisibility cloak based on integration of transparent metasurfaces and zero-index materials. Light Sci Appl, 7, 50(2018).
[325] Y K Wu, W H Yang, Y B Fan, Q H Song, S M Xiao. TiO2 metasurfaces: From visible planar photonics to photochemistry. Sci Adv, 5, eaax0939(2019).
[326] Y B Xie, C Shen, W Q Wang, J F Li, D J Suo et al. Acoustic holographic rendering with two-dimensional metamaterial-based passive phased array. Sci Rep, 6, 35437(2016).
[327] K Melde, A G Mark, T Qiu, P Fischer. Holograms for acoustics. Nature, 537, 518-522(2016).
[328] Y H Yang, H P Wang, F X Yu, Z W Xu, H S Chen. A metasurface carpet cloak for electromagnetic, acoustic and water waves. Sci Rep, 6, 20219(2016).
[329] J Chen, J Xiao, D Lisevych, A Shakouri, Z Fan. Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens. Nat Commun, 9, 4920(2018).
[330] Y Li, B M Assouar. Acoustic metasurface-based perfect absorber with deep subwavelength thickness. Appl Phys Lett, 108, 063502(2016).
[331] C Shen, S A Cummer. Harnessing multiple internal reflections to design highly absorptive acoustic metasurfaces. Phys Rev Appl, 9, 054009(2018).
[332] A Merkel, G Theocharis, O Richoux, V Romero-García, V Pagneux. Control of acoustic absorption in one-dimensional scattering by resonant scatterers. Appl Phys Lett, 107, 244102(2015).
[333] N Kaina, F Lemoult, M Fink, G Lerosey. Negative refractive index and acoustic superlens from multiple scattering in single negative metamaterials. Nature, 525, 77-81(2015).
[334] J Zhu, J Christensen, J Jung, L Martin-Moreno, X Yin et al. A holey-structured metamaterial for acoustic deep-subwavelength imaging. Nat Phys, 7, 52-55(2011).
[335] H L He, C Y Qiu, L P Ye, X X Cai, X Y Fan et al. Topological negative refraction of surface acoustic waves in a Weyl phononic crystal. Nature, 560, 61-64(2018).
[336] B Y Xie, H Liu, H Cheng, Z Y Liu, S Q Chen et al. Acoustic topological transport and refraction in a Kekulé Lattice. Phys Rev Appl, 11, 044086(2019).
[337] Y Chen, X D Yang, J Gao. Spin-controlled wavefront shaping with plasmonic chiral geometric metasurfaces. Light Sci Appl, 7, 84(2018).
[338] Z C Li, W W Liu, H Cheng, J Y Liu, S Q Chen et al. Simultaneous generation of high-efficiency broadband asymmetric anomalous refraction and reflection waves with few-layer anisotropic metasurface. Sci Rep, 6, 35485(2016).
[339] F Zhang, M B Pu, X Li, P Gao, X L Ma et al. All-dielectric metasurfaces for simultaneous giant circular asymmetric transmission and wavefront shaping based on asymmetric photonic spin-orbit interactions. Adv Funct Mater, 27, 1704295(2017).
[340] Z W Xie, T Lei, G Y Si, X Y Wang, J Lin et al. Meta-holograms with full parameter control of wavefront over a 1000 nm bandwidth. ACS Photonics, 4, 2158-2164(2017).
[341] B Wang, F L Dong, D Yang, Z W Song, L H Xu et al. Polarization-controlled color-tunable holograms with dielectric metasurfaces. Optica, 4, 1368-1371(2017).
[342] L Jin, Z G Dong, S T Mei, Y F Yu, Z Wei et al. Noninterleaved metasurface for (26-1) spin- and wavelength-encoded holograms. Nano Lett, 18, 8016-8024(2018).
[343] W Ma, F Cheng, Y M Liu. Deep-learning-enabled on-demand design of chiral metamaterials. ACS Nano, 12, 6326-6334(2018).
[344] D J Liu, Y X Tan, E Khoram, Z F Yu. Training deep neural networks for the inverse design of nanophotonic structures. ACS Photonics, 5, 1365-1369(2018).
[345] Q Zhang, C Liu, X Wan, L Zhang, S Liu et al. Machine-learning designs of anisotropic digital coding metasurfaces. Adv Theory Simul, 2, 1800132(2019).
[346] K Yao, R Unni, Y B Zheng. Intelligent nanophotonics: merging photonics and artificial intelligence at the nanoscale. Nanophotonics, 8, 339-366(2019).
[347] Z W Liu, S Yan, H G Liu, X F Chen. Superhigh-resolution recognition of optical vortex modes assisted by a deep-learning method. Phys Rev Lett, 123, 183902(2019).
[348] P Cheben, R Halir, J H Schmid, H A Atwater, D R Smith. Subwavelength integrated photonics. Nature, 560, 565-572(2018).
[349] P Genevet, J Lin, M A Kats, F Capasso. Holographic detection of the orbital angular momentum of light with plasmonic photodiodes. Nat Commun, 3, 1278(2012).
[350] S L Sun, Q He, S Y Xiao, Q Xu, X Li et al. Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves. Nat Mater, 11, 426-431(2012).
[351] J Lin, J P B Mueller, Q Wang, G H Yuan, N Antoniou et al. Polarization-controlled tunable directional coupling of surface plasmon polaritons. Science, 340, 331-334(2013).
[352] W J Sun, Q He, S L Sun, L Zhou. High-efficiency surface plasmon meta-couplers: concept and microwave-regime realizations. Light Sci Appl, 5, e16003(2016).
[353] P Genevet, D Wintz, A Ambrosio, A She, R Blanchard et al. Controlled steering of Cherenkov surface plasmon wakes with a one-dimensional metamaterial. Nat Nanotechnol, 10, 804-809(2015).
[354] D Vercruysse, P Neutens, L Lagae, N Verellen, P Van Dorpe. Single asymmetric plasmonic antenna as a directional coupler to a dielectric waveguide. ACS Photonics, 4, 1398-1402(2017).
[355] Arango F Bernal, A Kwadrin, A F Koenderink. Plasmonic antennas hybridized with dielectric waveguides. ACS Nano, 6, 10156-10167(2012).
[356] R Guo, M Decker, F Setzpfandt, X Gai, D Y Choi et al. High-bit rate ultra-compact light routing with mode-selective on-chip nanoantennas. Sci Adv, 3, e1700007(2017).
[357] Y H Guo, M B Pu, X Li, X L Ma, S C Song et al. Chip-integrated geometric metasurface as a novel platform for directional coupling and polarization sorting by spin-orbit interaction. IEEE J Sel Top Quantum Electron, 24, 1-7(2018).
[358] Y B Zhang, Z C Li, W W Liu, Z Li, H Cheng et al. Spin-selective and wavelength-selective demultiplexing based on waveguide-integrated all-dielectric metasurfaces. Adv Opt Mater, 7, 1801273(2019).
[359] A Y Piggott, J Lu, K G Lagoudakis, J Petykiewicz, T M Babinec et al. Inverse design and demonstration of a compact and broadband on-chip wavelength demultiplexer. Nat Photonics, 9, 374-377(2015).
[360] Z H Liu, X H Liu, Z Y Xiao, C C Lu, H Q Wang et al. Integrated nanophotonic wavelength router based on an intelligent algorithm. Optica, 6, 1367-1373(2019).
[361] D Ohana, B Desiatov, N Mazurski, U Levy. Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides. Nano Lett, 16, 7956-7961(2016).
[362] B Shen, P Wang, R Polson, R Menon. An integrated-nanophotonics polarization beamsplitter with 2.4×2.4 μm2 footprint. Nat Photonics, 9, 378-382(2015).
[363] Z Y Li, M H Kim, C Wang, Z H Han, S Shrestha et al. Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces. Nat Nanotechnol, 12, 675-683(2017).
[364] C Wang, Z Y Li, M H Kim, X Xiong, X F Ren et al. Metasurface-assisted phase-matching-free second harmonic generation in lithium niobate waveguides. Nat Commun, 8, 2098(2017).
[365] S F Li, D G Zhao, H Niu, X F Zhu, J F Zang. Observation of elastic topological states in soft materials. Nat Commun, 9, 1370(2018).
[366] S H Mousavi, A B Khanikaev, Z Wang. Topologically protected elastic waves in phononic metamaterials. Nat Commun, 6, 8682(2015).
[367] S Y Yu, C He, Z Wang, F K Liu, X C Sun et al. Elastic pseudospin transport for integratable topological phononic circuits. Nat Commun, 9, 3072(2018).
[368] N B Li, J Ren, L Wang, G Zhang, P Hänggi et al.
[369] Y N Guo, T Dekorsy, M Hettich. Topological guiding of elastic waves in phononic metamaterials based on 2D pentamode structures. Sci Rep, 7, 18043(2017).
[370] J Ren, S Liu, B W Li. Geometric heat flux for classical thermal transport in interacting open systems. Phys Rev Lett, 108, 210603(2012).