Outer Gear Sets Micro-Fabrication by Two-Photon Polymerization

Cui Lianhe

doi:10.3788/lop52.051403

[1] Li Zitao, Li Yaming. Progress in organic two-photon absorption materials[J]. Chemical Research, 2006, 17(2): 102-107.

[2] Y H Hsueh. Micro Manufacturing System for Two-Photon Polymerization with Automatic Focus and Tilt Correction[D]. Taipei: National Taiwan University, 2013.

[3] Ming Zhou, Lipeng Liu, Qixun Dai, et al.. Microfabrication technology by femtosecond laser direct scanning using two photon photo polymerization[C]. SPIE, 2004, 5645(6): 240-247.

[4] H Misawa, H Sun, S Juodkazis, et al.. Microfabrication by femtosecond laser irradiation[C]. SPIE, 2000, 3933: 246-260.

[5] B H Cumpston, S P Ananthavel, S Barlaw, et al.. Two-photon polymerization initiators for three-dimensional optical data storage and micro fabrication[J]. Nature, 1999, 398(6722): 51-54.

[6] G Witzgall, R Vrijen, E Yablonovitch, et al.. Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures[J]. Opt Lett, 1998, 23: 1745-1747.

[7] S Kawata, H Sun, T Tanaka, et al.. Finer features for functional micro devices[J]. Nature, 2001, 412(6848): 697-698.

[8] I Wang, M Bouriau, P L Baldeck, et al.. Three-dimensional microfabrication by two-photon-initiated polymerization with a low-cost micro laser[J]. Opt Lett, 2002, 27(15): 1348-1350.

[9] Wang Tao, Shi Mengquan, Li Xue, et al.. Progress in two-photon polymerization and its application[J]. Photographic Science and Photo Chemistry, 2003, 21(3): 223-230.

[10] Chen Xiaoliang, Ren Naifei, Wang Qun. Femtosecond laser two-photon polymerization 3d micro-fabrication technology and system research[J]. Machinery, 2006, 44 (498): 27-30.

[11] C L Tseng. Design and Fabrication of Micro Devices by Two-Photon Polymerization Technology[D]. Taipei: National Taiwan University, 2011.

[12] Wu Dong. Two-Photon Polymerization Micro-Fabrication by Femtosecond Laser[D]. Jilin: Jilin University, 2005: 18-23.

[13] T Watanabe, M Akiayama, K Totani, et al.. Photo responsive hydrogel microstructure fabricated by two-photon initiated polymerization[J]. Adv Funct Mater, 2002, 12(9): 611-615.

[14] Wang Yulan, Chen Weiqiang, Dong Xianzi, et al.. Novel organic salts as two-photon polymerization photo initiator: synthesis and properties[J]. Photographic Science and Photo Chemistry, 2007, 25(5): 350-356.