Design of a Four Port Electronic Calibrator Based on RF MEMS Switch

CAO Qianlong; WU Qiannan; ZHU Guangzhou; CHEN Yu; WANG Junqiang; LI Mengwei

doi:10.13911/j.cnki.1004-3365.210367

Journals >Microelectronics >Volume 52 >Issue 3 >Page 437 > Article

Microelectronics
Vol. 52, Issue 3, 437 (2022)

Design of a Four Port Electronic Calibrator Based on RF MEMS Switch

CAO Qianlong^1、2、3, WU Qiannan^1、3、4, ZHU Guangzhou^1、2、3, CHEN Yu^1、2、3, WANG Junqiang^1、2、3, and LI Mengwei^1、2、3

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

⁴[in Chinese]

show less

DOI: 10.13911/j.cnki.1004-3365.210367 Cite this Article

CAO Qianlong, WU Qiannan, ZHU Guangzhou, CHEN Yu, WANG Junqiang, LI Mengwei. Design of a Four Port Electronic Calibrator Based on RF MEMS Switch[J]. Microelectronics, 2022, 52(3): 437 Copy Citation Text

show less

References

[1] REBEIZ G M，MULDAVIN J B，SCHOENLINNER B, et al. RF MEMS: theory, design, and technology ［M］. John Wiley & Sons, Inc., 2003.

[13] RIEKKINEN T, MOLARIUS J, LAURILA T, et al. Reactive sputter deposition and properties of TaxN thin films ［J］. Microelec Engineer, 2002, 64(1-4): 289-297.

[14] CHEN D, WU J, YANG F B, et al. Microstructure, hardness, and wear resistance of sputtering TaN coating by controlling RF input power ［J］. Surface & Coatings Technol, 2016.

[15] LEE D W, KIM Y N, CHO M Y, et al. Reliability and characteristics of magnetron sputter deposited tantalum nitride for thin film resistors ［J］. Thin Solid Films, 2018, 660(8): 688-694.

CAO Qianlong, WU Qiannan, ZHU Guangzhou, CHEN Yu, WANG Junqiang, LI Mengwei. Design of a Four Port Electronic Calibrator Based on RF MEMS Switch[J]. Microelectronics, 2022, 52(3): 437

Download Citation

Tools

Save the article for my favorites

Paper Information