Characteristics of a ground aluminium diffuse plate at ultraviolate-vacuum ultraviolate(UV-VUV)and that of a BaSO4 and a polytetrafluoroethylene (PTFE) diffuse plate at UV are described. The ρ(0,d) of the BaSO4 and the ground aluminium diffuse plate in 250 nm～400 nm is measured by comparing with the PTFE diffuse plate whose ρ(0,d) is known. Also,the aging of the ρ(0,d) of the BaSO4 diffuse plate is presented. The fBRDF(0,θd) of the three diffuse materials is calculated.