• Acta Photonica Sinica
  • Vol. 53, Issue 2, 0212001 (2024)
Zhiyao MA, Donghui ZHENG*, Lei CHEN, and Jun MA
Author Affiliations
  • Nanjing University of Science and Technology,School of Electronic and Optical Engineering,Nanjing 210094,China
  • show less
    DOI: 10.3788/gzxb20245302.0212001 Cite this Article
    Zhiyao MA, Donghui ZHENG, Lei CHEN, Jun MA. Method for Refractive Index Uniformity Measurement Based on Two-flat and Three-flat Test[J]. Acta Photonica Sinica, 2024, 53(2): 0212001 Copy Citation Text show less
    Steps of two-flats refractive index uniformity test
    Fig. 1. Steps of two-flats refractive index uniformity test
    The original simulation wave
    Fig. 2. The original simulation wave
    Recovered refractive index uniformity wavefront results and its residual comparison
    Fig. 3. Recovered refractive index uniformity wavefront results and its residual comparison
    Experimental setup for two flats refractive index uniformity test
    Fig. 4. Experimental setup for two flats refractive index uniformity test
    Wavefront of refractive index uniformity of transmission flat by two flats method
    Fig. 5. Wavefront of refractive index uniformity of transmission flat by two flats method
    Experiment of transmission method for refractive index uniformity test
    Fig. 6. Experiment of transmission method for refractive index uniformity test
    Steps for measure refractive index uniformity by transmission method
    Fig. 7. Steps for measure refractive index uniformity by transmission method
    The result of refractive index uniformity
    Fig. 8. The result of refractive index uniformity
    Relationship between the rotation angle error and the residual error
    Fig. 9. Relationship between the rotation angle error and the residual error
    Relationship between the pixel offset and residual error
    Fig. 10. Relationship between the pixel offset and residual error
    WavefrontOriginal wavefront AOriginal wavefront BOriginal wavefront CRefractive index uniformity wavefront
    PV/nm50.6566.6763.1478.00
    RMS/nm5.529.538.6311.59
    Table 1. PV and RMS values of original simulation wavefront
    WavefrontOriginal refractive index uniformityRecovered refractive index uniformityRest error
    PV/nm78.0072.4421.11
    RMS/nm11.599.276.57
    Table 2. The PV and RMS values of recovered refractive index uniformity
    WavefrontRecovered refractive index uniformity by two flats methodRecovered refractive index uniformity by transmission method
    PV/nm62.8059.06
    RMS/nm12.0510.78
    Table 3. PV and RMS of the recovered refractive index uniformity
    Zhiyao MA, Donghui ZHENG, Lei CHEN, Jun MA. Method for Refractive Index Uniformity Measurement Based on Two-flat and Three-flat Test[J]. Acta Photonica Sinica, 2024, 53(2): 0212001
    Download Citation