• Laser & Optoelectronics Progress
  • Vol. 51, Issue 11, 110902 (2014)
Zhao Longbo1、2、*, Zhang Zhiyu1, Zhu Deyan1、2, Wang Yanchao1、2, Zheng Ligong1, and Zhang Xuejun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop51.110902 Cite this Article Set citation alerts
    Zhao Longbo, Zhang Zhiyu, Zhu Deyan, Wang Yanchao, Zheng Ligong, Zhang Xuejun. Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing[J]. Laser & Optoelectronics Progress, 2014, 51(11): 110902 Copy Citation Text show less

    Abstract

    In order to realize high-precision testing of aspherical surface, the key technology for fabricating computer generated hologram (CGH) by laser-direct writing (DWL) is studied in this paper. To obtain the minimum line-width deviation, the influences of defocus and the wet-etching processes on the line-width are firstly investigated. The position errors under different line-widths are obtained by analyzing the relationship of line-width error and the position error. According to the above-obtained results, a CGH with diameter of 80 mm and the minimum line-width of 1.8 mm is successfully fabricated. Testing results show that the wavefront error is only 0.011l, achieving the l/100 level. The fabricated CGH is expected to be used in the high-precision testing of asphercal surfaces.
    Zhao Longbo, Zhang Zhiyu, Zhu Deyan, Wang Yanchao, Zheng Ligong, Zhang Xuejun. Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing[J]. Laser & Optoelectronics Progress, 2014, 51(11): 110902
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