Calibration Method on Image Lateral Displacement Transmission-Type System Based on the Aberration Bounded Model

Xu Chunmei; Liu Bingqi; Huang Fuyu; Zhang Chu; Li Li

doi:10.3788/lop52.090801

[1] Fan Xuewu, Chen Rongli, Ma Zhen, et al.. A Study on the primary aberration theory of decentered and tilted optical system[J]. Acta Photonica Sinica, 2004, 33(4): 494-496.

[2] Yang Xinjun, Wang Zhaoqi, Mu Guoguang, et al.. Aberration properties of the decentered and tilted optical systems[J]. Acta Photonica Sinica, 2005, 34(11): 1659-1662.

[3] Liao Zhibo, Wang Chunyu, Li Mengjuan, et al.. Research on computer-aided alignment based on refract optical system [J]. Infrared and Laser Engineering, 2013, 42(9): 2453-2456.

[4] Guo Xiarui, Liao Zhibo, Wang Chunyu, et al.. Aberration and alignment quality investigation of space transmission optical system with centering error of optical axes[J]. Infrared and Laser Engineering, 2012, 41(2): 436-441.

[5] Sun Jinxia, Pan Guoqing, Liu Ying. Third- order aberrations of a plane symmetric optical system[J]. Acta Physica Sinica, 2013, 62(9): 094203.

[6] Zhao Feifei, Tang Jianyu, Huang Wei, et al.. Computer-aided alignment for the lithographic lens[J]. Acta Optica Sinica, 2014, 34(6): 0622001.

[7] Cheng Shoucheng. Calibration Theory of Optical Instruments[M]. Beijing: Weapon Industry Press, 1992.