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Journals >Chinese Optics Letters >Volume 17 >Issue 9 >Page 093102 > Article

Chinese Optics Letters
Vol. 17, Issue 9, 093102 (2019)

Te-free SbBi thin film as a laser heat-mode photoresist

Kui Zhang^1、2, Zhengwei Wang^1、2, Guodong Chen^1、2, Yang Wang^1、*, Aijun Zeng¹, Jing Zhu¹, Syarhei Avakaw³, and Heorgi Tsikhanchuk³

Author Affiliations

¹Laboratory of Micro-Nano Optoelectronic Materials and Devices, Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³KBTEM-OMO Joint Stock Company, Minsk 220033, Republic of Belarus

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DOI: 10.3788/COL201917.093102 Cite this Article Set citation alerts

Kui Zhang, Zhengwei Wang, Guodong Chen, Yang Wang, Aijun Zeng, Jing Zhu, Syarhei Avakaw, Heorgi Tsikhanchuk. Te-free SbBi thin film as a laser heat-mode photoresist[J]. Chinese Optics Letters, 2019, 17(9): 093102 Copy Citation Text

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Data from CrossRef

[1] Jingjing Zhang, Junbo Yang, Linmei Liang, Wenjun Wu. Broadband TM-mode-pass polarizer and polarization beam splitter using asymmetrical directional couplers based on silicon subwavelength grating. Optics Communications, 407, 46(2018).

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Kui Zhang, Zhengwei Wang, Guodong Chen, Yang Wang, Aijun Zeng, Jing Zhu, Syarhei Avakaw, Heorgi Tsikhanchuk. Te-free SbBi thin film as a laser heat-mode photoresist[J]. Chinese Optics Letters, 2019, 17(9): 093102

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