Wang Daodang, Xiang Chao, Zhu Qixing, Kong Ming, Xu Xinke. Compact multi-measurement mode interferometer for on-machine testing[J]. Infrared and Laser Engineering, 2020, 49(6): 20190472
- Infrared and Laser Engineering
- Vol. 49, Issue 6, 20190472 (2020)
Fig. 1. System layout for compact multi-measurement mode interferometer
Fig. 2. Wavefront measurement error introduced by quarter-wave plate
Fig. 3. Error of field of view in polarization camera
Fig. 4. Photo of system device
Fig. 5. Measurement results of surface
Fig. 6. Measurement results of surface roughness
Fig. 7. Measurement results about surface figure with multi-wavelength method
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