[1] Hauchecorne A, Chanin M L. Density and temperature profiles obtained by lidar between 35 and 70 km[J]. Geophysical Re-search Letters, 1980, 7(8): 565–568.
[2] Koch G J, Barnes B W, Petros M, et al. Coherent differential absorption lidar measurements of CO2[J]. Applied Optics, 2004, 43(26): 5092–5099.
[3] Schwarz B. LIDAR: Mapping the world in 3D[J]. Nature Pho-tonics, 2010, 4(7): 429–430.
[4] Collis R T H, Russell P B. Lidar measurement of particles and gases by elastic backscattering and differential absorp-tion[M]//Hinkley E D. Laser Monitoring of the Atmosphere. Ber-lin, Heidelberg: Springer, 1976: 71–151.
[5] Gschwendtner A B, Keicher W E. Development of coherent laser radar at Lincoln Laboratory[J]. Lincoln Laboratory Journal, 2000, 12(2): 383–396.
[6] Niclass C, Ito K, Soga M, et al. Design and characterization of a 256x64-pixel single-photon imager in CMOS for a MEMS-based laser scanning time-of-flight sensor[J]. Optics Express, 2012, 20(11): 11863–11881.
[7] McCarthy A, Ren X M, Della Frera A, et al. Kilometer-range depth imaging at 1550 nm wavelength using an InGaAs/InP single-photon avalanche diode detector[J]. Optics Express, 2013, 21(19): 22098–22113.
[8] Heck M J R. Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steer-ing[J]. Nanophotonics, 2017, 6(1): 93–107.
[9] Nee J T, Conant R A, Muller R S, et al. Lightweight, optically flat micromirrors for fast beam steering[C]//Proceedings of 2000 IEEE/LEOS International Conference on Optical MEMS, 2000: 9–10.
[10] Xu Y S, Singh J, Selvaratnam T, et al. Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2009, 15(5): 1432–1438.
[11] Koh K H, Lee C. A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms[C]//Proceedings of 2012 International Conference on Optical MEMS and Nanophotonics, 2012: 236–237.
[12] Urey H. MEMS scanners for display and imaging applica-tions[J]. Proceedings of SPIE, 2004, 5604: 218–229.
[13] Uchino K. Piezoelectric actuators 2006[J]. Journal of Electro-ceramics, 2008, 20(3–4): 301–311.
[14] Tani M, Akamatsu M, Yasuda Y, et al. A combination of fast resonant mode and slow static deflection of SOI-PZT actuators for MEMS image projection display[C]//Proceedings of 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006: 25–26.
[15] Chu H M, Hane K. Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner[J]. Sensors and Actuators A: Physical, 2011, 165(2): 422–430.
[16] Errando-Herranz C, Le Thomas N, Gylfason K B. Low-power optical beam steering by microelectromechanical waveguide gratings[J]. Optics Letters, 2019, 44(4): 855–858.
[17] Hofmann U, Senger F, Soerensen F, et al. Biaxial resonant 7mm-MEMS mirror for automotive LIDAR applica-tion[C]//Proceedings of 2012 International Conference on Opt-ical MEMS and Nanophotonics, 2012: 150–151.
[18] Sandner T, Wildenhain M, Gerwig C, et al. Large aperture MEMS scanner module for 3D distance measurement[J]. Pro-ceedings of SPIE, 2010, 7594: 75940D.
[19] Senger F, Hofmann U, Von Wantoch T, et al. Centimeter-scale MEMS scanning mirrors for high power laser application[J]. Proceedings of SPIE, 2015, 9375: 937509.
[20] Jung I W, Krishnamoorthy U, Solgaard O. High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic combdrives[J]. Journal of Mi-croelectromechanical Systems, 2006, 15(3): 563–571.
[21] Yang W J, Sun T B, Rao Y, et al. High speed optical phased array using high contrast grating all-pass filters[J]. Optics Express, 2014, 22(17): 20038–20044.
[22] Anthes J P, Garcia P, Pierce J T, et al. Nonscanned ladar im-aging and applications[J]. Proceedings of SPIE, 1993, 1936: 11–22.
[23] Stettner R. Compact 3D flash lidar video cameras and applica-tions[J]. Proceedings of SPIE, 2010, 7684: 768405.
[24] Natale D J, Tutwiler R L, Baran M S, et al. Using full motion 3D Flash LIDAR video for target detection, segmentation, and tracking[C]//Proceedings of 2010 IEEE Southwest Symposium on Image Analysis & Interpretation, 2010: 21–24.
[25] Amzajerdian F, Vanek M, Petway L, et al. Utilization of 3D imaging flash lidar technology for autonomous safe landing on planetary bodies[J]. Proceedings of SPIE, 2010, 7608: 760828.
[26] Ramond T, Saiki E, Weimer C, et al. Topographic mapping flash lidar for multiple scattering, terrain, and forest mapping[J]. Proceedings of SPIE, 2011, 8037: 803710.
[27] Stettner R, Bailey H, Richmond R D. Eye-safe laser radar 3D imaging[J]. Proceedings of SPIE, 2004, 5412: 111–117.
[28] Stettner R, Bailey H, Silverman S. Large format time-of-flight focal plane detector development[J]. Proceedings of SPIE, 2005, 5791: 288–292.
[29] Marino R M, Stephens T, Hatch R E, et al. A compact 3D im-aging laser radar system using Geiger-mode APD arrays: sys-tem and measurements[J]. Proceedings of SPIE, 2003, 5086: 1–15.
[30] Aull B F, Schuette D R, Young D J, et al. A study of crosstalk in a 256×256 photon counting imager based on silicon geig-er-mode avalanche photodiodes[J]. IEEE Sensors Journal, 2015, 15(4): 2123–2132.
[31] Jack M, Chapman G, Edwards J, et al. Advances in ladar components and subsystems at Raytheon[J]. Proceedings of SPIE, 2012, 8353: 83532F.
[32] Zhang P, Du X P, Zhao J G, et al. High resolution flash three-dimensional LIDAR systems based on polarization mod-ulation[J]. Applied Optics, 2017, 56(13): 3889–3894.
[33] Jo S, Kong H J, Bang H, et al. High resolution three-dimensional flash LIDAR system using a polarization modulating Pockels cell and a micro-polarizer CCD camera[J]. Optics Express, 2016, 24(26): A1580–A1585.
[34] McManamon P F, Dorschner T A, Corkum D L, et al. Optical phased array technology[J]. Proceedings of the IEEE, 1996, 84(2): 268–298.
[35] Engstr.m D, O'Callaghan M J, Walker C, et al. Fast beam steering with a ferroelectric-liquid-crystal optical phased ar-ray[J]. Applied Optics, 2009, 48(9): 1721–1726.
[36] Meyer R A. Optical beam steering using a multichannel lithium tantalate crystal[J]. Applied Optics, 1972, 11(3): 613–616.
[37] Chung S, Abediasl H, Hashemi H. A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS[J]. IEEE Journal of Solid-State Circuits, 2018, 53(1): 275–296.
[38] Sun J, Hosseini E S, Yaacobi A, et al. Two-dimensional apo-dized silicon photonic phased arrays[J]. Optics Letters, 2014, 39(2): 367–370.
[39] Poulton C V, Yaacobi A, Cole D B, et al. Coherent solid-state LIDAR with silicon photonic optical phased arrays[J]. Optics Letters, 2017, 42(20): 4091–4094.
[40] Martin A, Dodane D, Leviandier L, et al. Photonic integrated circuit-based FMCW coherent LiDAR[J]. Journal of Lightwave Technology, 2018, 36(19): 4640–4645.
[41] Abediasl H, Hashemi H. Monolithic optical phased-array tran-sceiver in a standard SOI CMOS process[J]. Optics Express, 2015, 23(5): 6509–6519.
