Xizhao LU, Jialin CHEN, Qiuling WEN, Jing LU, Feng JIANG. Short-pulse Laser-induced Plasma Micro-etching of High-temperature and High Pressure Single Crystal Diamond[J]. Acta Photonica Sinica, 2021, 50(6): 129
- Acta Photonica Sinica
- Vol. 50, Issue 6, 129 (2021)
Fig. 1. Schematic diagram of LIPAA principle and experimental device
Fig. 2. Diamond sample diagram after LIPAA processing
Fig. 3. Measuring the temperature field of laser-induced plasma-assisted etching of diamond surface
Fig. 4. SEM topography and surface products of diamond microstructure
Fig. 5. The relationship between processing parameters and microstructure size during laser-induced copper target processing with low repetition frequency and 5 ns pulse width
Fig. 6. Scanning electron microscope and three-dimensional video optical microscope to observe the groove morphology of laser-induced plasma etching with different pulse widths
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Table 1. Optics source of short-pulse infrared laser induced plasma micro-etching single crystal diamond
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