• Optoelectronic Technology
  • Vol. 43, Issue 4, 351 (2023)
Hui ZHAO, Yanchang WANG, and Tao HUA
Author Affiliations
  • Nanjing BOE Display Technology Co.,Ltd., Nanjing 210033, CHN
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    DOI: 10.19453/j.cnki.1005-488x.2023.04.013 Cite this Article
    Hui ZHAO, Yanchang WANG, Tao HUA. Investigation and Research onThreshold Voltage in IGZO TFT Process[J]. Optoelectronic Technology, 2023, 43(4): 351 Copy Citation Text show less
    References

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    [6] Yun M G, Kim S H, Ahn C H et al. Effects of channel thickness on electrical properties and stability of zinc tin oxide thin-film transistors[J]. Journal of Physics D: Applied Physics, 46, 475106(2013).

    [7] Wang Y, Sun X W, Goh G K L et al. Influence of channel layer thickness on the electrical performances of inkjet-printed In-Ga-Zn oxide thin-film transistors[J]. IEEE, 58, 480-485(2011).

    [8] Chen J, Wang L, Su X Q et al. Pulsed laser deposited InGaZnO thin film on silica glass[J]. Non-Cryst.Solids, 358, 2466-2469(2012).

    [9] Mallory Mativenga, Dong Han Kang et al. Study of mechanism of stress-induced threshold voltage shift and recovery in top-gate amorphous — InGaZnO4 thin-film transistors with source and drain offsets[J]. Solid State Communications, 152, 1739-1743(2012).

    [10] Nomura K, Ohta H, Takagi A et al. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors[J]. Nature, 432, 488-452(2004).

    [11] Yabuta H, Sano M, Abe K et al. High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering[J]. Appl. Phys. Lett, 89(2006).

    Hui ZHAO, Yanchang WANG, Tao HUA. Investigation and Research onThreshold Voltage in IGZO TFT Process[J]. Optoelectronic Technology, 2023, 43(4): 351
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