Hui ZHAO, Yanchang WANG, Tao HUA. Investigation and Research onThreshold Voltage in IGZO TFT Process[J]. Optoelectronic Technology, 2023, 43(4): 351
- Optoelectronic Technology
- Vol. 43, Issue 4, 351 (2023)
Fig. 1. V TH map
Fig. 2. Mask-glass position
Fig. 3. Mask-glass position
Fig. 4. Plasma distribution
Fig. 5. Schematic of optimized plasma distribution
Fig. 6. V TH fluctuation of different oxygen partial pressures
Fig. 7. Optimized V TH map
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