Optical readout method based on time-discrete modulation for micro-cantilever array sensing

Xuhong Chu; Liquan Dong; Yuejin Zhao; Xiaomei Yu; Yun Feng

doi:10.3788/COL201614.101102

Journals >Chinese Optics Letters >Volume 14 >Issue 10 >Page 101102 > Article

Chinese Optics Letters
Vol. 14, Issue 10, 101102 (2016)

Optical readout method based on time-discrete modulation for micro-cantilever array sensing

Xuhong Chu¹, Liquan Dong^1、*, Yuejin Zhao¹, Xiaomei Yu², and Yun Feng¹

Author Affiliations

¹Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

²Institute of Microelectronics, Peking University, Beijing 100087, China

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DOI: 10.3788/COL201614.101102 Cite this Article Set citation alerts

Xuhong Chu, Liquan Dong, Yuejin Zhao, Xiaomei Yu, Yun Feng. Optical readout method based on time-discrete modulation for micro-cantilever array sensing[J]. Chinese Optics Letters, 2016, 14(10): 101102 Copy Citation Text

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Fig. 1. (a) FPA and its pixel and (b) the bi-material micro-cantilever structure of an FPA pixel.

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Fig. 2. Time-discrete modulation optical readout IR FPA imaging system.

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Fig. 3. Mechanical chopper.

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Fig. 4. Chopper wheel and its motor drive unit.

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Fig. 5. Images of a hot iron captured by the optical readout IR FPA imaging system (a,b) without time-discrete modulation and (c) with time-discrete modulation.

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Fig. 6. Image sequence of a hot iron captured by the optical readout IR FPA imaging system without time-discrete modulation.

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Fig. 7. Image sequence of a hot iron captured by the optical readout IR FPA imaging system with time-discrete modulation.

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	Fig. 5(a)		Fig. 5(b)		Fig. 5(c)
	Value	Mean	Value	Mean	Value	Mean
$G_{\max 1}$	98	98	163	165.3	160	161
$G_{\max 2}$	92		176		156
$G_{\max 3}$	104		157		167
$G_{n 1}$	21	20	36	36.3	4.1	3.1
$G_{n 2}$	24		30		2.3
$G_{n 3}$	15		43		2.8
NETD	$Δ T \times k \times 0.204$		$Δ T \times k \times 0.219$		$Δ T \times k \times 0.019$