Xi Ren, Shengping Du, Ke Chen, Jihong Wang. Error Source and Spectrum Analysis for Angle Measurement of Circular Grating Encoder[J]. Laser & Optoelectronics Progress, 2020, 57(17): 171205
- Laser & Optoelectronics Progress
- Vol. 57, Issue 17, 171205 (2020)
Fig. 1. Diagram of circular grating encoder
Fig. 2. Principle of angle measurement of circular grating encoder
Fig. 3. Installation eccentricity error of circular grating encoder
Fig. 4. Ellipse error of circular grating encoder
Fig. 5. Diagrams of bearing motion error. (a) Horizontal movement; (b) vertical movement; (c) movement at δ
Fig. 6. Distribution of four reading heads
Fig. 7. Time domain analysis of single reading head error. (a) H0; (b) H1; (c) H2; (d) H3
Fig. 8. Frequency domain analysis of measured error of single reading head
Fig. 9. Time domain analysis of measured error of double reading head
Fig. 10. Frequency domain analysis of measured error of double reading head
Fig. 11. Time domain result of measured error of four reading heads
Fig. 12. Frequency domain result of measured error of four reading heads
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Table 1. Specifications for graduation accuracy in actual circular grating system
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