Lei Huang, Tianyi Wang, Mourad Idir. Study on stitching interferometry for synchrotron mirror metrology[J]. Infrared and Laser Engineering, 2020, 49(3): 303012
- Infrared and Laser Engineering
- Vol. 49, Issue 3, 303012 (2020)
Fig. 1. The essential purpose of stitching is to determine the geometric relation for the subset data
Fig. 2. Photos of the hardware and the software interface in the NSLS-II stitching platform
Fig. 3. Photos of the X-ray flat mirror. To check the self-consistency of a measurement system, the SUT is usually tested in (a) A- to- B orientation and (b) B- to- A orientation (SUT rotated 180° along its surface normal)
Fig. 4. Different sub-apertures (highlighted in a yellow rectangle) with (a) 600 pixel×150 pixel and (b) 256 pixel×64 pixel are used to measure this X-ray flat mirror in software stitching mode for comparison
Fig. 5. 30 repeated scans on the X-ray flat mirror show excellent stitching repeatability
Fig. 6. Measurement discrepancies of the central line (a) are at sub-nanometer level, and most of the discrepancies have an RMS value less than 0.15 nm (b)
Fig. 7. Similar results are obtained by different stitching interferometers at ESRF and NSLS-II using different sub-apertures in different mirror orientations on different dates
Fig. 8. x -slope values along the 2.5-mm-wide center line are calculated from the stitched data and compared with the NSLS-II NSP data. Some curves are vertically shifted for clarity
Fig. 9. Photo of the measured X-ray hyperbolic cylindrical mirror
Fig. 10. Stitched height maps of the X-ray hyperbolic cylindrical mirror surface (a) and the shape errors after removing the target shape (b)
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