• Journal of Infrared and Millimeter Waves
  • Vol. 21, Issue 3, 167 (2002)
[in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. HIGH QUALITY NANOCRYSTALLINE DIAMOND FILMS GROWN BY RF-HFCVD[J]. Journal of Infrared and Millimeter Waves, 2002, 21(3): 167 Copy Citation Text show less
    References

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    [2] Lorenz Hans Peter, Schilling Wolfgang. Influence of process parameters on the size of the bias-nucleated area for diamond with plasma-enhanced chemical vapor deposition. Diamond and Related Materials, 1997,6:6

    [3] Polo M C, Wang W L, Sanchez G, et al. Nucleation and initial growth of bias-assisted HFCVD diamond on boron nitride films. Diamond and Related Materials, 1997,6:597

    [4] Yang W S, Jung Ho Je. Effects of secondary pretreatments of substrate on the nucleation of diamond film. J. Mater. Res., 1996,11:1787

    [5] Park B S, Baik Y J. Nucleation enhancement behavior of diamond on Si substrate according to surface treatment materials. Diamond and Related Materials, 1997,6:1716

    [6] Avigal Y, Hoffman A. A new method for nucleation enhancement of diamond. Diamond and Related Materials, 1999,8:127

    [7] Pai M P, Musale D V, Kshirsagar S T, et al. Effect of coupling of radio-frequency plasma on the growth of diamond films in a hot filament reactor. Thin Solid Films, 1998,322:167

    [9] Lin Z D, Chen Y, Chen Q J. Very low pressure nucleation of diamond on mirror-smooth silicon in hot filament chemical vapor deposition system. Chin.Phys.Lett.,1996,13(10):753

    [11] Zhang Y F, Zhang F, Gao Q J, et al. Synthesis of nano-crystalline diamond film in hot filament chemical vapor deposition by adding Ar. Chin. Phys. Lett., 2001,18(2):286

    [12] Marcus B, Fayette L, Mermoux M, et al. Analysis of the structure of multi-component carbon films by resonant Raman scattering. J. APPL. Phys.,1994,76(6):3463

    [13] Shroder R E, Nemanich R J, Glass J T. Analysis of the composite structures in diamond thin films by Raman spectroscopy. Phys. Rev., B, 1990,41(6):3738

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. HIGH QUALITY NANOCRYSTALLINE DIAMOND FILMS GROWN BY RF-HFCVD[J]. Journal of Infrared and Millimeter Waves, 2002, 21(3): 167
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