• Chinese Journal of Lasers
  • Vol. 40, Issue 2, 216001 (2013)
Xiao Yanfen1、*, Zhu Jing1, Yang Baoxi1, Hu Zhonghua1、2, Zeng Aijun1, and Huang Huijie1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201340.0216001 Cite this Article Set citation alerts
    Xiao Yanfen, Zhu Jing, Yang Baoxi, Hu Zhonghua, Zeng Aijun, Huang Huijie. Design of Micro-Cylindrical-Lens Array Used for Illumination Uniformization in Lithography Systems[J]. Chinese Journal of Lasers, 2013, 40(2): 216001 Copy Citation Text show less

    Abstract

    Uniform illumination is an important condition for maintaining high uniformization consistence of lithography lines in projection lithography. Micro-lens array used as the illumination uniformization component can make the rectangular illumination spot as well as acquire high far field uniformization. Based on modern processing technology, the cylindrical micro-lens array divided in two-dimension is designed, and the central bright line in the far field created by the transition area between the micro-lens array is eliminated. Simulation results show that the far field non-uniformi of the designed micro-lens array reaches 0.85%.
    Xiao Yanfen, Zhu Jing, Yang Baoxi, Hu Zhonghua, Zeng Aijun, Huang Huijie. Design of Micro-Cylindrical-Lens Array Used for Illumination Uniformization in Lithography Systems[J]. Chinese Journal of Lasers, 2013, 40(2): 216001
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