A high-performance polarization independent reflector based on a multilayered grating structure with multi-subpart profile is discussed. Owing to the advantages of co-existence and interaction of TE polarization light and TM polarization light leaky modes, the proposed reflector can offer combined merits of high reflectivity (over 97%), wide angular bandwidth (about 24.6°), low insertion loss (below 0.25 dB) and low polarization dependent loss (below 0.18 dB) over a broadband spectrum of 1.65-1.72 μm. The rigorous coupled wave analysis method is used to verify the good process tolerance of the reflector in the existing process error range.