• Infrared and Laser Engineering
  • Vol. 50, Issue 11, 20200516 (2021)
Chen Wang1、2, Xu Liang1, Ying Lin1, and Xiaodong Fang1、3
Author Affiliations
  • 1Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
  • 2University of Science and Technology of China, Hefei 230026, China
  • 3Shenzhen ShengFang Tech Co., Ltd., Shenzhen 518000, China
  • show less
    DOI: 10.3788/IRLA20200516 Cite this Article
    Chen Wang, Xu Liang, Ying Lin, Xiaodong Fang. Synchronization trigger design of MOPA structure excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20200516 Copy Citation Text show less
    References

    [1] Haohan Zhu, Xiaochao Wang, Wenfa Huang, et al. High precision time synchronization fiducial system of SG-II high-power laser driver. Chinese Journal of Lasers, 46, 1101011(2019).

    [2] Z Dang, X D Yuan, X B Yuan, et al. The research of automatic control system of XG II laser facility. Optics & Opto-electronic Technology, 2, 36-39(2004).

    [3] X D Qian, X R Li, X Liang, et al. Synchronous control for MOPA excimer laser systems. Laser Technology, 39, 233-236(2015).

    [4] L Dong, X Y Liu, H Chen. Properties of pulse single-frequency laser and extra-cavity double frequency green laser. Chinese Optics, 8, 800-805(2015).

    [5] E Fujita, Y Mashiko, S Asaya, et al. High power narrow-line-width linearly-polarized 1610 nm Er: Yb all-fiber MOPA. Optics Express, 24, 26255(2016).

    [6] Takahito Chibana, Hitoshi Nakano, Hideo Hata, et al. Development status of a 193 nm immersion exposure tool[C]Proc of SPIE, 2006, 6154: 61541V.

    [7] X Liang, D L Zhao, Y Lin, et al. High repetition rate and high accuracy capacitor charging pulse power supply based on controllable LC series resonance. High Voltage Engineering, 44, 3022-3027(2018).

    [8] L H Qi, Q L Ni, B Chen. Experimental investigation of laser-produced-plasma EUV source based on liquid target. Optics and Precision Engineering, 13, 604-607(2005).

    [9] F Yu, D H Li, L Xue. Electromagnetic compatibility design in optics and image processing equipment. Optics and Precision Engineering, 100-106(2004).

    [10] N Pan, X Liang, Y Lin, et al. Transmission method of analog signal in excimer laser system. Infrared and Laser Engineering, 48, 0905003(2019).

    [11] R J Liu, C Ma, W Shi, et al. Study on time jitter and trigger synchronization characteristics of ns pulsed laser diode. Infrared and Laser Engineering, 49, 20200147(2020).

    [12] X Y Wang, G F Tang, X G Wei, et al. Discussion on isolation requirement of high voltage DC/DC converter for MMC-HVDC transmission system. Automation of Electric Power Systems, 41, 172-178(2017).

    [13] H Y Shi, J S Zhao, X L Song, et al. Analysison factors affecting energy stability of excimer laser for lithography. Infrared and Laser Engineering, 43, 3540-3546(2014).

    [14] D L Zhao, W J Li, X Liang, et al. Study on energy stability for excimer laser skin therapeutic apparatus. Infrared and Laser Engineering, 46, 1206001(2017).

    [15] Y Wang, K Ding, Y L Xu. Optical fiber vibration sensing system using delay line method. Microwave and Optical Technology Letters, 61, 853-857(2019).

    Chen Wang, Xu Liang, Ying Lin, Xiaodong Fang. Synchronization trigger design of MOPA structure excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20200516
    Download Citation