Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun Li; Liyuan Gu; Jingpei Hu; Linglin Zhu; Aijun Zeng; Huijie Huang

doi:10.3788/CJL201946.0204010

Journals >Chinese Journal of Lasers >Volume 46 >Issue 2 >Page 0204010 > Article

Chinese Journal of Lasers
Vol. 46, Issue 2, 0204010 (2019)

Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun Li^1、2、*, Liyuan Gu^1、2, Jingpei Hu¹, Linglin Zhu¹, Aijun Zeng^1、2、*, and Huijie Huang^1、2

Author Affiliations

¹ Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/CJL201946.0204010 Cite this Article Set citation alerts

Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration[J]. Chinese Journal of Lasers, 2019, 46(2): 0204010 Copy Citation Text

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