Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang. Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration[J]. Chinese Journal of Lasers, 2019, 46(2): 0204010
- Chinese Journal of Lasers
- Vol. 46, Issue 2, 0204010 (2019)
Fig. 1. Schematic of SPR-based imaging ellipsometer
Fig. 2. MOC for SPR generation based on cylindrical lens
Fig. 3. Simulation results of reflectivity curves for Au films with different thicknesses. (a) Numerical simulation results of SPR generated by cylindrical lens with MOC; (b) reflectivity curves of two positions whose direction YY'is orthogonal to cylinder axis, respectively
Fig. 4. Experimental setup. (a) Imaging ellipsometer; (b) Au film sample for SPR generation by cylindrical lens with MOC
Fig. 5. Measured results of SPR for Au films with different thicknesses. (a) Experimental results of SPR produced by cylindrical lens with MOC; (b) reflectivity curves of the No.3 line whose direction is orthogonal to cylinder axis
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