• Laser & Optoelectronics Progress
  • Vol. 51, Issue 4, 41201 (2014)
Zhou You* and Liu Shijie
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop51.041201 Cite this Article Set citation alerts
    Zhou You, Liu Shijie. Three-Flat Testing Program Design Based on Matlab and VC Mixed Programming[J]. Laser & Optoelectronics Progress, 2014, 51(4): 41201 Copy Citation Text show less

    Abstract

    An interferometric method for the absolute testing of optical flats, three- flat testing, is studied. This method needs three flats, which are combined in pairs in different positions, and measurements yield a vertical profile of data and a horizontal data profile along the diameter of the reference flat. According to Matlab and VC mixed programming, three- flat test of mutual inspection procedures is designed to quickly calculate experimental data with the help of an interferometer. Experiments are done to achieve high accuracy flatness measurement, and the calculation error is 3% relative to the Zygo software.
    Zhou You, Liu Shijie. Three-Flat Testing Program Design Based on Matlab and VC Mixed Programming[J]. Laser & Optoelectronics Progress, 2014, 51(4): 41201
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