• Acta Optica Sinica
  • Vol. 33, Issue 4, 430005 (2013)
Li Guowei*, Cao Wei, Wu Jianpeng, Tao Liping, and Ma Zhibin
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201333.0430005 Cite this Article Set citation alerts
    Li Guowei, Cao Wei, Wu Jianpeng, Tao Liping, Ma Zhibin. Influence of Methane Volume Fraction on the Radical Distribution in MPCVD Plasma[J]. Acta Optica Sinica, 2013, 33(4): 430005 Copy Citation Text show less
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    Li Guowei, Cao Wei, Wu Jianpeng, Tao Liping, Ma Zhibin. Influence of Methane Volume Fraction on the Radical Distribution in MPCVD Plasma[J]. Acta Optica Sinica, 2013, 33(4): 430005
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