• Journal of Semiconductors
  • Vol. 42, Issue 11, 112801 (2021)
Feng Liang1, Degang Zhao1、2, Zongshun Liu1, Ping Chen1, Jing Yang1, Lihong Duan1, Yongsheng Shi1, and Hai Wang1
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1088/1674-4926/42/11/112801 Cite this Article
    Feng Liang, Degang Zhao, Zongshun Liu, Ping Chen, Jing Yang, Lihong Duan, Yongsheng Shi, Hai Wang. GaN-based blue laser diode with 6.0 W of output power under continuous-wave operation at room temperature[J]. Journal of Semiconductors, 2021, 42(11): 112801 Copy Citation Text show less
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    [2] I Akasaki, S Sota, H Sakai et al. Shortest wavelength semiconductor laser diode. Electron Lett, 32, 1105(1996).

    [3] Z Zhang, M Kushimoto, T Sakai et al. A 271.8 nm deep-ultraviolet laser diode for room temperature operation. Appl Phys Express, 12, 124003(2019).

    [4] D G Zhao, J Yang, Z S Liu et al. Fabrication of room temperature continuous-wave operation GaN-based ultraviolet laser diodes. J Semicond, 38, 051001(2017).

    [5] F Liang, D G Zhao, D S Jiang et al. Performance deterioration of GaN-based laser diode by V-pits in the upper waveguide layer. Nanophotonics, 9, 667(2020).

    [6] F Liang, J Yang, D G Zhao et al. Room-temperature continuous-wave operation of GaN-based blue-violet laser diodes with a lifetime longer than 1000 h. J Semicond, 40, 022801(2019).

    [7] U T Schwarz, E Sturm, V Kümmler et al. Gain spectra and current-induced phase-shift in blue laser diodes. Frontiers in Optics, WMM3(2003).

    [8] M Kuramoto, Y Hisanaga, A Kimura et al. An alloy semiconductor system with a tailorable band-tail and its application to high-performance laser operation: II. Experimental study on InGaN MQW laser for optimization of differential gain characteristics tuned by In compositional fluctuation. Semicond Sci Technol, 16, 770(2001).

    [9] K Kojima, M Funato, Y Kawakami et al. Gain suppression phenomena observed in InxGa1−xN quantum well laser diodes emitting at 470 nm. Appl Phys Lett, 89, 241127(2006).

    [10] F Liang, J Yang, D G Zhao et al. Influence of hydrogen impurity on the resistivity of low temperature grown p-AlxGa1–xN layer (0.08 ≤ x ≤ 0.104). Superlattices Microstruct, 113, 720(2018).

    [11] X W Wang, F Liang, D G Zhao et al. Improving the homogeneity and quality of InGaN/GaN quantum well exhibiting high In content under low TMIn flow and high pressure growth. Appl Surf Sci, 548, 149272(2021).

    [12] X Wang, F Liang, D Zhao et al. Investigations on the optical properties of InGaN/GaN multiple quantum wells with varying GaN cap layer thickness. Nanoscale Res Lett, 15, 191(2020).

    [13] L Y Peng, D G Zhao, J J Zhu et al. Achieving homogeneity of InGaN/GaN quantum well by well/barrier interface treatment. Appl Surf Sci, 505, 144283(2020).

    [14] J Yang, D G Zhao, D S Jiang et al. Investigation on the compensation effect of residual carbon impurities in low temperature grown Mg doped GaN films. J Appl Phys, 115, 163704(2014).

    [15] F Liang, J Yang, D G Zhao et al. Resistivity reduction of low temperature grown p-Al0.09Ga0.91N by suppressing the incorporation of carbon impurity. AIP Adv, 8, 085005(2018).

    [16] Y Zhang, F Liang, D Zhao et al. Hydrogen can passivate carbon impurities in Mg-doped GaN. Nanoscale Res Lett, 15, 38(2020).

    [17] F Liang, D Zhao, D Jiang et al. Influence of residual carbon impurities in a heavily Mg-doped GaN contact layer on an Ohmic contact. Appl Opt, 56, 4197(2017).

    [18] F Liang, D G Zhao, D S Jiang et al. Improvement of Ohmic contact to p-GaN by controlling the residual carbon concentration in p++-GaN layer. J Cryst Growth, 467, 1(2017).

    Feng Liang, Degang Zhao, Zongshun Liu, Ping Chen, Jing Yang, Lihong Duan, Yongsheng Shi, Hai Wang. GaN-based blue laser diode with 6.0 W of output power under continuous-wave operation at room temperature[J]. Journal of Semiconductors, 2021, 42(11): 112801
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