• Matter and Radiation at Extremes
  • Vol. 4, Issue 2, 25401 (2019)
Longxiao Wang, Yun Wang*, Xianxian Ma, and Weiqian Zhao
Author Affiliations
  • Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
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    DOI: 10.1063/1.5085863 Cite this Article
    Longxiao Wang, Yun Wang, Xianxian Ma, Weiqian Zhao. Measurement of laser differential confocal geometrical parameters for ICF capsule[J]. Matter and Radiation at Extremes, 2019, 4(2): 25401 Copy Citation Text show less
    Laser differential confocal uniformity of the inner and outer radius and shell thickness measurement principle of an ICF capsule.
    Fig. 1. Laser differential confocal uniformity of the inner and outer radius and shell thickness measurement principle of an ICF capsule.
    Measurement errors introduced by the eccentricity, e, of the capsule.
    Fig. 2. Measurement errors introduced by the eccentricity, e, of the capsule.
    Axial resolution curve, Δu, for different NAs of objective lens.
    Fig. 3. Axial resolution curve, Δu, for different NAs of objective lens.
    Sketch map of the measurement system.
    Fig. 4. Sketch map of the measurement system.
    The established measurement system.
    Fig. 5. The established measurement system.
    Differential confocal curves of the points A, B, and O.
    Fig. 6. Differential confocal curves of the points A, B, and O.
    Repeated measurements of the outer radius, R.
    Fig. 7. Repeated measurements of the outer radius, R.
    Repeated measurements of the shell thickness, T.
    Fig. 8. Repeated measurements of the shell thickness, T.
    Repeated measurements of the inner radius, r.
    Fig. 9. Repeated measurements of the inner radius, r.
    Repeated measurements of the outer radius uniformity.
    Fig. 10. Repeated measurements of the outer radius uniformity.
    Repeated measurements of the shell thickness uniformity.
    Fig. 11. Repeated measurements of the shell thickness uniformity.
    Repeated measurements of the inner radius uniformity.
    Fig. 12. Repeated measurements of the inner radius uniformity.
    90°180°270°
    R (μm)439.981441.175440.630443.456
    T (μm)51.20051.66451.57751.630
    r (μm)388.781389.511389.053391.826
    Table 1. Measurement results of inner and outer radius and shell thickness of ICF capsule.
    90°180°270°
    σR (μm)0.0230.0230.0150.008
    σT (μm)0.0190.0210.0250.014
    σr (μm)0.0140.0180.0220.014
    Table 2. Repeated measurements of the standard deviation of R, T and r.
    Longxiao Wang, Yun Wang, Xianxian Ma, Weiqian Zhao. Measurement of laser differential confocal geometrical parameters for ICF capsule[J]. Matter and Radiation at Extremes, 2019, 4(2): 25401
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