[in Chinese], [in Chinese], [in Chinese]. Study on discharge circuit of excimer laser[J]. Chinese Journal of Quantum Electronics, 2004, 21(4): 456
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The discharge circuit of excimer laser by high voltage discharge pumping was studied theoretically. The variation laws of the discharge circuit are presented, while the relation between the energy transfer efficiency and circuit parameters were analyzed, which are the reference basis for the efficient and reliable discharge circuit design of excimer laser.