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    Journals >Opto-Electronic Engineering >Volume 44 >Issue 12 >Page 1244 > Article
    • Opto-Electronic Engineering
    • Vol. 44, Issue 12, 1244 (2017)
    Study on etch process of GaSb-based VCSEL
    Xin Zhang, Yang Li, Xia Wang, Yang Li, Gangli Yue, Zhiwei Wang, Jianlai Xie, Jiabin Zhang, and Yongqin Hao
    Author Affiliations
  • National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China
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    DOI: Cite this Article
    Xin Zhang, Yang Li, Xia Wang, Yang Li, Gangli Yue, Zhiwei Wang, Jianlai Xie, Jiabin Zhang, Yongqin Hao. Study on etch process of GaSb-based VCSEL[J]. Opto-Electronic Engineering, 2017, 44(12): 1244 Copy Citation Text show less
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    Xin Zhang, Yang Li, Xia Wang, Yang Li, Gangli Yue, Zhiwei Wang, Jianlai Xie, Jiabin Zhang, Yongqin Hao. Study on etch process of GaSb-based VCSEL[J]. Opto-Electronic Engineering, 2017, 44(12): 1244
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