Qidong Cong, Genfu Yuan, Chen Zhang, Baicheng Guo. Etching Mechanism of Quartz Glass by Laser-Induced Chemical Reactions of Barium Compounds[J]. Laser & Optoelectronics Progress, 2018, 55(2): 021402
- Laser & Optoelectronics Progress
- Vol. 55, Issue 2, 021402 (2018)
Fig. 1. Schematic of experimental setup for Nd3+∶YAG laser etching of glass
Fig. 2. Experimental method diagram of etching quartz glassby laser-induced chemical reactions of barium compounds
Fig. 3. SEM macro-topographies of micro-channels etched by two methods. (a) BaCrO4, front view; (b) Ba(OH)2, front view; (c) BaCrO4, cross-sectional view; (d) Ba(OH)2, cross-sectional view
Fig. 4. Micro-topographies on bottom surfaces of micro-channels etched by laser-induced chemical reactions. (a) BaCrO4; (b) Ba(OH)2
Fig. 5. EDSimages. (a) BaCrO4, area A; (b) BaCrO4, area B; (c) Ba(OH)2, area C
Fig. 6. XRD images of etching products in micro-channels etched by laser-induced chemical reactions of BaCrO4
Fig. 7. XRD images of etching products in micro-channels etched by laser-induced chemical reactions of BaCrO4
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Table 1. Mass fraction and atomic fraction of etching products
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