• Opto-Electronic Engineering
  • Vol. 45, Issue 4, 170671 (2018)
Wang Hao1、2, Dong Lianhe1, Zhu Guodong2, Zhang Dong2, and Zhang Weiguo2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.12086/oee.2018.170671 Cite this Article
    Wang Hao, Dong Lianhe, Zhu Guodong, Zhang Dong, Zhang Weiguo. Fabrication method of quartz aspheric microlens array for turning mask[J]. Opto-Electronic Engineering, 2018, 45(4): 170671 Copy Citation Text show less
    References

    [1] Yang G S, Chen T, Chen H. Crack-free silica glass surface micro-grooves etched by 248 nm excimer lasers[J]. Chinese Journal of Lasers, 2017, 44(9): 0902004.

    [2] Zhang J, Sugioka K, Takahashi T, et al. Dual-beam ablation of fused silica by multiwavelength excitation process using KrF excimer and F2 lasers[J]. Applied Physics A, 2000, 71(1): 23–26.

    [3] Cui Z. Micro-nanofabrication Technologies and Applications[M]. 3rd ed. Beijing: Higher Education Press, 2013: 24–32.

    [4] Zhang J, Dai L, Wang F, et al. Restraint of mid-spatial-frequency error aspheric surface by small-tool adaptive polishing[J]. Acta Optica Sinica, 2013, 33(8): 0822002.

    [5] Ridge M T, Cox D C, Webb R P, et al. The fabrication of aspherical microlenses using focused ion-beam techniques[J]. Micron, 2014, 57: 56–66.

    [6] Yuan W, Chan C Y, Li L H, et al. Investigation of the surface profile along the cutting trajectory and its correlation with cutting forces in single point diamond turning[J]. The International Journal of Advanced Manufacturing Technology, 2017, 89(5–8): 1327–1338.

    [7] Wang Y, Yu J C. Compensation for error of diamond tool’s cutting edge in single diamond turning[J]. Opto-Electronic Engineering, 2011, 38(1): 98–102.

    [8] Gong L B, Cheung C F. Modeling and characterization of surface generation in fast tool servo machining of microlens arrays[ J]. Computers & Industrial Engineering, 2012, 63(4): 957–970.

    [9] Dunkel J, Wippermann F, Brückner A, et al. Fabrication of refractive freeform array masters for artificial compound eye cameras[J]. Proceedings of SPIE, 2014, 9130: 91300P.

    [10] Mukaida M, Yan J W. Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo[J]. International Journal of Machine Tools and Manufacture, 2017, 115: 2–14.

    [11] Chen Y L, Cai Y D, Tohyama K, et al. Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo[J]. Precision Engineering, 2017, 49: 253–261.

    [12] Yan F, Fan D, Zhang B Z, et al. Manufacturing and testing of a SiC unrotational-symmetric aspherical optics[J]. Opto-Electronic Engineering, 2009, 36(3): 135–139.

    [13] Zhu H F, Jia C P, Fang Z L. Design method and optical performance of aspherical IOL[J]. Opto-Electronic Engineering, 2009, 36(4): 56–59.

    [14] En D, Xu K X, Chen C H, et al. Development of integrated optical aplanatic double-convex aspherical waveguide lens[J]. Opto-Electronic Engineering, 2008, 35(10): 98–101, 115.

    [15] Zhang S F, Liu Z T, Li Y P, et al. Preparation and characterization of nanoimprint template on quartz by reactive ion etching[J]. Mechanical Science and Technology for Aerospace Engineering, 2012, 31(11): 1786–1789.

    [16] Chiromawa N L, Ibrahim K. Fabrication of micro-array of Fresnel rings on Si by electron beam lithography and reactive ion etching[J]. Applied Physics A, 2016, 122(2): 129.

    [17] Xie Y P, Wu P, Yang Z, et al. Continuous microstructure etching process polyimide based moving mask exposure[J]. Acta Photonica Sinica, 2015, 44(9): 0922004.

    [18] Yu E, Kim S C, Lee H J, et al. Extreme wettability of nanostructured glass fabricated by non-lithographic, anisotropic etching[J]. Scientific Reports, 2015, 5: 9362.

    [19] Mahoney S A, Rufford T E, Rudolph V, et al. Creation of microchannels in Bowen Basin coals using UV laser and reactive ion etching[J]. International Journal of Coal Geology, 2015, 144–145: 48–57.

    [20] Lu Z Y, Hu G H, Yun B F, et al. RIE technological study of polymer optical waveguide[J]. Microfabrication Technology, 2008(3): 5–9.

    [21] Zhang C C, Yang C S, Ding G F, et al. Deep reactive ion etching of polymethylmethacrylate[J]. Vacuum Science and Technology, 2004, 24(2): 157–160.

    [22] Shi L F, Du C L, Dong X C, et al. Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure[J]. Applied Optics, 2007, 46(34): 8346–8350.

    Wang Hao, Dong Lianhe, Zhu Guodong, Zhang Dong, Zhang Weiguo. Fabrication method of quartz aspheric microlens array for turning mask[J]. Opto-Electronic Engineering, 2018, 45(4): 170671
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