Lu ZHONgLIANG, TANS JINfA. Computer analysis of TEM micrographs of thin film surface replicas[J]. Acta Optica Sinica, 1988, 8(8): 735
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The thin-film surface topographs have been obtained with the computer analysis of micrographs of surface replicas. A new method of calibration with the aid of computer is given. The statistical properties of optical surfaces, such as r. m. s roughness, autocorrelation length and autocorrelation function are also calculated.