Fig. 1. Surface topography of the swallow-tailed defect (a) optical microscope images with 200 magnification, (b) optical microscope images with 1000 magnification, (c) SEM image ,Note(s): The arrays in (b) show different direction of raised side in triangle defect. The four dash lines in (c) are outlines of the defect. Capital A, B, C in (c) represent three EDS test areas.
Fig. 2. White light interferometry images of HgCdTe surface (a) 100 μm×100 μm area,(b) defect marked in figure (a),(c) triangular defects.
Fig. 3. Cross-sectional SEM images at different positions, the cross-sectional plane is
(11¯1¯)![]()
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face (a) schematic of outlines of swallow-tailed defect and cleavage positions A, B, and C, (b) shows position A after FIB etching, (c-e) represents position A, B and C after cleavage, respectively.
Fig. 4. Structure of swallow-tailed defect in epi-layer (a) Schematic graph, (b) defect structure from Diamond software.
Fig. 5. HRXRD omega-2theta scan pattern, (a) HgCdTe with swallow-tailed defect, (b) single crystal HgCdTe, (c) CdTe buffer of HgCdTe with swallow-tailed defect, (d) CdTe buffer of single crystal HgCdTe
Fig. 6. Schematic of different atomic sequence along [111] direction of (211) and (552) grain.
Fig. 7. Bright field microscopy images of CdTe after Everson etching (a)the typical triangle etch pits observed on type-I CdTe, (b)surface turned to black and no etch pit found in Type-II CdTe
Fig. 8. Bright field microscopy images of Te-terminated CdTe and Cd-terminated CdTe (a) Te-terminated CdTe,(b)Cd-terminated CdTe
Fig. 9. HRXRD ω-2θ scan pattern (a) 2 μm HgCdTe on CdTe/Ge, (b) 2 μm CdTe on Ge
区域 | 成分 |
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A | Hg26.90%, Cd19.66%, Te53.44% | B | Hg27.35%, Cd20.15%, Te52.50% | C | Hg28.71%, Cd19.40%, Te51.89% |
|
Table 1. “燕尾”状缺陷内及附近碲镉汞组分值