• Acta Optica Sinica
  • Vol. 31, Issue 4, 431002 (2011)
Huang Yun*, Wu Suyong, and Yang Kaiyong
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201131.0431002 Cite this Article Set citation alerts
    Huang Yun, Wu Suyong, Yang Kaiyong. Active Design of Multilayer Optical Coatings Based on Sensitivity Control[J]. Acta Optica Sinica, 2011, 31(4): 431002 Copy Citation Text show less

    Abstract

    Deposition errors of oblique incidence optical coatings have a serious degradation influence on their spectral characteristics according to practical preparation experiences. An active multilayer optical coating design method based on sensitivity control is put forward to minimize the above influence. The distribution law of deposited layers′ errors of structural parameters is thoroughly analyzed. Calculation model of multilayer optical coating′s sensitivity is analytically established. Numerical design experiments in large incident angle non-polarization antireflection coatings are operated to explore and verify the feasibility and effectiveness of sensitivity control thought in films design. And numerical results show that this optical coating design method can obtain films with good manufacture feasibility without extending much program time consumption. Additionally, this design technique can make the planning of manufacture process possible without expensive sampling and make a shortening production cycle for new coating systems. It is of obvious significance for repetitive production of high quality oblique incidence optical coatings.
    Huang Yun, Wu Suyong, Yang Kaiyong. Active Design of Multilayer Optical Coatings Based on Sensitivity Control[J]. Acta Optica Sinica, 2011, 31(4): 431002
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