General consideration of optical system in the projection aligner

WANG ZHIJIANG; ZOU HAIXING

Journals >Acta Optica Sinica >Volume 7 >Issue 2 >Page 159 > Article

Acta Optica Sinica
Vol. 7, Issue 2, 159 (1987)

General consideration of optical system in the projection aligner

WANG ZHIJIANG and ZOU HAIXING

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[in Chinese]

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WANG ZHIJIANG, ZOU HAIXING. General consideration of optical system in the projection aligner[J]. Acta Optica Sinica, 1987, 7(2): 159 Copy Citation Text

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Abstract

The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.

Keywords

optical system scan projection aligner