• Optics and Precision Engineering
  • Vol. 26, Issue 5, 1070 (2018)
CHEN Zhi-yong*, SONG Lin, ZHANG Rong, ZHOU Bin, and WEI Qi
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20182605.1070 Cite this Article
    CHEN Zhi-yong, SONG Lin, ZHANG Rong, ZHOU Bin, WEI Qi. Rapid start-up control of high Q-factor MEMS gyroscope[J]. Optics and Precision Engineering, 2018, 26(5): 1070 Copy Citation Text show less

    Abstract

    The control method of the drive axis was investigated with the goal of rapid startup of the MEMS gyroscope with a high Q-factor. The change rate of the vibration phase of the high Q-factor resonator with frequency was analyzed, and the reason for the long starting time of the phase-locked loop scheme in addition to its sensitivity to the initial frequency deviation was elucidated. The variation rule of the amplitude at the initial stage of the self-excited oscillation scheme with time was deduced by using the averaging method. A control scheme that combines the self-exited oscillation loop and the phase-locked loop (SEOL-PLL) of the drive axis was proposed. The self-excited oscillation mode was used to quickly start the gyroscope, and then the phase-locked loop was used to maintain the accuracy and stability of the vibration frequency. In the experiment, when the initial frequency deviation of the PLL is less than ±10 Hz, the starting time of the gyroscope is 2 s. Whereas with the SEOL-PLL scheme, a frequency error of 0.01% is achieved in 0.3 s and an amplitude error of 0.1% is achieved in 0.4 s, as long as the initial frequency deviation is within ±1 000 Hz. The “SEOL-PLL” solution considerably reduces the start-up time and is insensitive to the initial frequency deviation of the gyroscope. It is therefore suitable for the mass production of MEMS gyroscope and has a good adaptability to ambient temperature change.
    CHEN Zhi-yong, SONG Lin, ZHANG Rong, ZHOU Bin, WEI Qi. Rapid start-up control of high Q-factor MEMS gyroscope[J]. Optics and Precision Engineering, 2018, 26(5): 1070
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