• Acta Photonica Sinica
  • Vol. 49, Issue 11, 126 (2020)
Chen ZHANG, Jie ZHU, Yu ZHANG, Kai-ge WANG, Wei ZHAO, Ya-ping YANG, Xiao-qiang FENG, Hao-wei CHEN, and Jin-tao BAI
Author Affiliations
  • State Key Laboratory of Western Energy Photon Technology and Functional Materials Jointly Built by Province and Ministry, National Center for International Research of Photoelectric Technology & Nano⁃functional Materials and Application, Key Laboratory of Photoelectron Technology of Shaanxi Province, Institute of Photonics and Photon⁃Technology, Northwest University, Xi'an710127, China
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    DOI: 10.3788/gzxb20204911.1149009 Cite this Article
    Chen ZHANG, Jie ZHU, Yu ZHANG, Kai-ge WANG, Wei ZHAO, Ya-ping YANG, Xiao-qiang FENG, Hao-wei CHEN, Jin-tao BAI. Advances in Laser Nanofabrication Technology of High-molecular Polymer and Its Application (Invited)[J]. Acta Photonica Sinica, 2020, 49(11): 126 Copy Citation Text show less
    References

    [1] K SUGIOKA, Y CHENG. Ultrafast lasers-reliable tools for advanced materials processing. Light: Science & Applications, 3(2014).

    [2] A G POLESHCHUK, V P KOROLLKOV, V P VEIKO. Laser technologies in micro-optics. Part 2. Fabrication of elements with a three-dimensional profile. Optoelectronics Instrumentation and Data Processing, 54, 113-126(2018).

    [3] He HUANG, Shi-jie CHEN, Hong-mei ZOU. Fabrication of micro-axicons using direct-laser writing. Optics Express, 22, 11035-11042(2014).

    [4] Jing-yu ZHANG, M GECEVIČIUS, M BERESNA. Seemingly unlimited lifetime data storage in nanostructured glass. Physical Review Letters, 112, 033901(2014).

    [5] P KAZANSKY, A CERKAUSKAITE, M BERESNA. Eternal 5D data storage by ultrafast laser writing in glass, 9736, 97360U(2016).

    [6] Jian-wen CAI, Yan-lei HU, Wen-hao HUANG. Three dimension optical storage of femtosecond laser base on micro explosion material. Infrared and Laser Engineering, 47, 79-83(2018).

    [7] T BALDACCHINIA, J E CAREY, Ming ZHOU. Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser. Langmuir the ACS Journal of Surfaces & Colloids, 22, 4917-4919(2006).

    [8] A Y VOROBYEV, C GUO. Laser turns silicon superwicking. Optics Express, 18, 6455-6460(2010).

    [9] V DUMAS, A GUIGNANDON, L VICO. Femtosecond laser nano/micro patterning of titanium influences mesenchymal stem cell adhesion and commitment. Biomedical Materials, 10, 055002(2015).

    [10] Li-bin LU, Hai-peng WANG, Ying-chun GUAN. Laser microfabrication of biomedical devices. Chinese Journal of Laser, 44, 0102005(2017).

    [13] H MUKAIBO, L P HORNE, D PARK. Controlling the length of conical pores etched in ion-tracked poly(ethylene terephthalate) membranes. Small, 5, 2474-2479(2009).

    [14] C C HARRELL, Z S SIWY. MARTIN C R. Conical nanopore membranes: controlling the nanopore shape. Small, 2, 194-198(2006).

    [15] C R MARTIN. Nanomaterials: a membrane-based synthetic approach. Science, 266, 1961-1966(1995).

    [16] J A ROGERS, K E PAUL, R J JACKMAN. Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field. Applied Physics Letters, 70, 2658-2660(1997).

    [17] S ROTH, L DELLMANN, G A RACINE. High aspect ration UV photolithography for electroplated structures. Journal of Micromechanics and Microengineering, 9, 105-108(1999).

    [18] C W HULL. Apparatus for production of three-dimensional objects by stereolithography. US.

    [19] W KAISER, C GARRETT. Two-photon excitation in CaF2∶Eu2+. Physical Review Letters, 7, 229-231(1961).

    [20] S MARUO, O NAKAMURA, S KAWATA. Three-dimensional microfabrication with two-photon-absorbed photopolymerization. Optics Letters, 22, 132-134(1997).

    [21] E S WU, J H STRICKLER, W R HARRELL. Two-photon lithography for microelectronic application, 1674, 776-782(1992).

    [22] S KAWATA, Hong-bo SUN, T TANAKA. Finer features for functional microdevices. Nature, 412, 697-698(2001).

    [23] Deng-feng TAN, Yan LI, Feng-jie QI. Reduction in feature size of two-photon polymerization using SCR500. Applied Physics Letters, 90, 071106(2007).

    [24] Lin-jie LI, R R GATTASS, E GERSHGOREN. Achieving lambda/20 resolution by one-color initiation and deactivation of polymerization. Science, 324, 910-913(2009).

    [25] T F SCOTT, B A KOWALSKI, A C SULLIVAN. Two-color single-photon photoinitiation and photoinhibition for subdiffraction photolithography. Science, 324, 913-917(2009).

    [26] Zong-song GAN, Yao-yu CAO, R A EVANS. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nature Communications, 4, 2061(2012).

    [27] P MULLER, R MULLER, L HAMMER. STED-inspired laser lithography based on photoswitchable spirothiopyran moieties. Chemistry of Materials, 31, 1966-1972(2019).

    [28] Liang QIN, Yuan-qing HUANG, Feng XIA. 5 nm nanogap electrodes and arrays by super-resolution laser lithography. Nano Letters, 20, 4916-4923(2020).

    [29] Min-lin ZHONG, Pei-xun FAN. Applications of laser nano manufacturing technologies. Chinese Journal of Laser, 38, 0601001(2011).

    [30] Dong YANG, Li-pu LIU, Hong YANG. Laser micro-nano three-dimensional printing. Laser & Optoelectronics Progress, 55, 011411(2018).

    [31] Liang-liang YANG, Jiang-tao WEI, Zhe MA. The fabrication of micro/nano structures by laser machining. Nanomaterials, 9, 1789(2019).

    [32] Jin-feng XING, Mei-ling ZHENG, Xuan-ming DUAN. Two-photon polymerization microfabrication of hydrogels: an advanced 3D printing technology for tissue engineering and drug delivery. Chemical Society Reviews, 44, 5031-5039(2015).

    [33] A MISHRA, Kan HU. Review: femtosecond-laser-based 3D printing for tissue engineering and cell biology applications. ACS Biomaterials Science & Engineering, 3, 2198-2214(2017).

    [34] A G POLESHCHUK, A A KUTANOV, V P BESSMELTSEV. Microstructuring of optical surfaces: technology and device for direct laser writing of diffractive structures. Optoelectronics Instrumentation and Data Processing, 46, 86-96(2010).

    [35] K SUGIOKA, Ya CHENG. A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods. Advanced Optical Technologies, 1, 353-364(2012).

    [36] A GRZYBOWSKI, K PIETRZAK. Maria Goeppert-Mayer.(1906-1972): Two-photon effect on dermatology. Clinics in Dermatology, 31, 221-225(2013).

    [37] V MIZEIKIS, Hong-bo SUN, A MARCINKEVICIUS. Femtosecond laser micro-fabrication for tailoring photonic crystals in resins and silica. Journal of Photochemistry & Photobiology A: Chemistry, 145, 41-47(2001).

    [38] K SUGIOKA, Yan CHENG. Femtosecond laser 3D micromachining for microfluidic and optofluidic applications(2013).

    [39] Yao-yu CAO, Zong-song GAN, Bao-hua JIA. High-photosensitive resin for super-resolution direct-laser-writing based on photoinhibited polymerization. Optics Express, 19, 19486-19494(2011).

    [40] V WESTPHAL, S W HELL. Nanoscale resolution in the focal plane of an optical microscope. Physical Review Letters, 94, 143903(2005).

    [41] J FISCHER, G V FREYMANN, M WEGENER. The materials challenge in diffraction-unlimited direct-laser-writing optical lithography. Advanced Materials, 22, 3578-3582(2010).

    [42] P MUELLER, M M ZIEGER, B RICHTER. A molecular switch for sub-diffraction laser lithography by photoenol intermediate-state Cis-Trans isomerization. ACS Nano, 11, 6396-6403(2017).

    [43] W HASKE, V W CHEN, J M HALES. 65 nm feature sizes using visible wavelength 3-D multiphoton lithography. Optics Express, 15, 3426-3436(2007).

    [44] Dun-zhao WEI, Chao-wei WANG, Xiao-yi XU. Efficient nonlinear beam shaping in three-dimensional lithium niobate nonlinear photonic crystals. Nature Communications, 10, 4193(2019).

    [45] T WOGGON, T KLEINER, M PUNKE. Nanostructuring of organic-inorganic hybrid materials for distributed feedback laser resonators by two-photon polymerization. Optics Express, 17, 2500-2507(2009).

    [46] M THIEL, M HEMATSCHWEILER. Three-dimensional laser lithography: A new degree of freedom for science and industry. Optik & Photonik, 6, 36-39(2011).

    [47] Jia-le YONG, Jing-lan HUO, Qing YANG. Femtosecond laser direct writing of porous network microstructures for fabricating super‐slippery surfaces with excellent liquid repellence and anti‐cell proliferation. Advanced Materials Interfaces, 5, 1701479(2018).

    [48] Jian-nan WANG, Yu-qing LIU, Yong-lai ZHANG. Wearable superhydrophobic elastomer skin with switchable wettability. Advanced Functional Materials, 28, 1800625(2018).

    [49] M THIEL, J FISCHER, VON REYMANN G. Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532 nm. Applied Physics Letters, 97, 221102(2010).

    [50] Chen ZHANG, Kai-ge WANG, Jin-tao BAI. Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography system. Nanoscale Research Letters, 8, 280(2013).

    [51] Lian-bin FAN, Chen ZHANG, Hong-fu LI. Direct CW-laser writing sub-diffraction-limit nanopore array based on the low one-photon absorption of polymer. Rare Metal Materials and Engineering, 47, 75-81(2018).

    [52] W RICHARD, B BIANCA, E CHRISTINE. Functional photoresists for sub-diffraction stimulated emission depletion lithography. Optical Materials Express, 7, 2538-2559(2017).

    [53] R WOLLHOFEN, J KATZMANN, C HRELESCU. 120 nm resolution and 55 nm structure size in STED-lithography. Optics Express, 21, 10831-10840(2013).

    [54] Bao-hua JIA, Han LIN, Min GU. Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabrication. Optics Letters, 36, 406-408(2011).

    [55] Yan-lei HU, Yu-hang CHEN, Jian-qiang MA. High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization. Applied Physics Letters, 103, 270-276(2013).

    [56] Liang YANG, Dong-dong QIAN, Chen XING. Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam. Optics Letters, 42, 743-746(2017).

    [57] V GASZTON, K LORAND. Holographic multi-focus 3D two-photon polymerization with real-time calculated holograms. Optics Express, 22, 24217-24223(2014).

    [58] Lin-yu YAN, Dong YANG, Qi-huang GONG. Rapid fabrication of continuous surface Fresnel microlens array by femtosecond laser focal field engineering. Micromachines, 11, 112-120(2020).

    [59] Jin-cheng NI, Zhong-yu WANG, Zi-qin LI. Multifurcate assembly of slanted micropillars fabricated by superposition of optical vortices and application in high-efficiency trapping microparticles. Advanced Functional Materials, 27, 1701939(2017).

    [60] Han LI. Creation of Debye diffraction-limited multifocal arrays and their application in laser nanofabrication(2013).

    [61] Qiang GENG, Di-en WANG, Peng-fei CHEN. Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization. Nature Communications, 10, 2179(2019).

    [62] Ke DU, I WATHUTHANTHRI, Yu-yang LIU. Wafer-scale pattern transfer of metal nanostructures on polydimethylsiloxane (PDMS) substrates via holographic nanopatterns. ACS Applied Materials & Interfaces, 4, 5505-5514(2012).

    [63] Ke DU, Yu-yang LIU, I WATHUTHANTHRI. Dual applications of free-standing holographic nanopatterns for lift-off and stencil lithography. Journal of Vacuum Science & Technology B Microelectronics & Nanometer Structures, 30, 06(2012).

    [64] C QUAN, Shi-hua WANG. Integrated optical inspection on surface geometry and refractive index distribution of a microlens array. Optics Communications, 225, 223-231(2003).

    [65] S KUIPER, B H W HENDRIKS. Variable-focus liquid lens for miniature cameras. Applied Physics Letters, 85, 1128-1130(2004).

    [66] N SOODBISWAS, M A SEKH, S SARKAR. Anamorphic gradient index (GRIN) lens for beam shaping. Optics Communications, 285, 2607-2610(2012).

    [67] T MOGI, K HATAKEYAMA, T TAGUCHI. Real-time detection of DNA hybridization on microarray using a CCD-based imaging system equipped with a rotated microlens array disk. Biosensors and Bioelectronics, 26, 1942-1946(2011).

    [68] A ŽUKAUSKAS, K TIKUISIS. . Single-step direct laser fabrication of complex shaped microoptical components. SPIE Photonics Europe(2012).

    [69] Dong WU, Qi-dai CHEN, Li-gang NIU. 100% fill-factor aspheric microlens arrays (AMLA) with sub-20-nm precision. IEEE Photonics Technology Letters, 21, 1535-1537(2009).

    [70] Dong WU, Si-zhu WU, Li-gang NIU. High numerical aperture microlens arrays of close packing. Applied Physics Letters, 97, 031109(2010).

    [71] Chong ZHENG, An-ming HU, D BRIDGES, et al. Optics Express, 23, 17584-17598(2015).

    [72] Dong-xiao LU, Yong-lai ZHANG, Dong-dong HAN. Solvent-tunable PDMS microlens fabricated by femtosecond laser direct writing. Journal of Materials Chemistry C, 3, 1751-1756(2014).

    [73] Hong-bo SUN, M SHIGEKI, M HIROAKI. Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin. Applied Physics Letters, 74, 786-788(1999).

    [74] M DEUBEL, G V FREYMANN, M WEGENER. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nature Materials, 3, 444-447(2004).

    [75] O KUFELT, A EI-TAMER, C SEHRING. Water-soluble photopolymerizable chitosan hydrogels for biofabrication via two-photon polymerization. Acta Biomaterialia, 18, 186-195(2015).

    [76] O KUFELT, A El-TAMER, C SEHRING. Hyaluronic acid based materials for scaffolding via two-photon polymerization. Biomacromolecules, 15, 650-659(2014).

    [77] F KLEIN, T STRIEBEL, J FISCHER. Elastic fully three-dimensional microstructure scaffolds for cell force measurements. Advanced Materials, 22, 868-871(2010).

    [78] F KLEIN, B RICHTER, T STRIEBEL. Two-component polymer scaffolds for controlled three-dimensional cell culture. Advanced Materials, 23, 1341-1345(2011).

    [79] I A PAUN, R C POPESCU, C C MUSTACIOSU. Laser-direct writing by two-photon polymerization of 3D honeycomb-like structures for bone regeneration. Biofabrication, 10, 025009(2018).

    [80] S TURUNEN, T JOKI, M L HILTUNEN. Direct laser writing of tubular microtowers for 3D culture of human pluripotent stem cell-derived neuronal cells. ACS Applied Materials & Interfaces, 9, 25717-25730(2017).

    [81] Dong WU, Qi-dai CHEN, Li-gang NIU. Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices. Lab on a Chip, 9, 2391-2394(2009).

    [82] Hong XIA, Juan WANG, Ye TIAN. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization. Advanced Materials, 22, 3204-3207(2010).

    [83] I NOBUAKI, H YASUTAKA, I IKUKO. Femtosecond laser-fabricated biochip for studying symbiosis between Phormidium and seedling root. Applied Physics B, 119, 503-508(2015).

    [84] H YASUTAKA, S KOJI, S I IKUKO. 3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria. Lab on a Chip, 11, 2109-2115(2011).

    [85] Wei WANG, Yun-qing LIU, Yan LIU. Direct laser writing of superhydrophobic PDMS elastomers for controllable manipulation via Marangoni effect. Advanced Functional Materials, 27, 1702946(2017).

    [86] Bing XU, Yang SHI, Zhao-xin LAO. Real-time two-photon lithography in controlled flow to create a single-microparticle array and particle-cluster array for optofluidic imaging. Lab on a Chip, 18, 442-450(2017).

    [87] Yao-yu CAO, Fei XIE, Peng-da ZHANG. Dual-beam super-resolution direct laser writing nanofabrication technology. Opto⁃Electronic Engineering, 44, 1133-1145(2017).

    [88] Mei-ling JIANG, Ming-si ZHANG, Xiang-ping LI. Research progress of super-resolution optical data storage. Opto⁃Electronic Engineering, 46, 79-90(2019).

    [89] T GROTJOHANN, I TESTA, M LEUTENEGGER. Diffraction-unlimited all-optical imaging and writing with a photochromic GFP. Nature, 478, 204-208(2011).

    [90] Min GU, Xiang-ping LI, Yao-yu CAO. Optical storage arrays: a perspective for future big data storage. Light: Science & Applications, 3(2014).

    [91] Xiang-ping LI, Yao-yu CAO, Ni-an TIAN. Multifocal optical nanoscopy for big data recording at 30 TB capacity and gigabits/second data rate. Optica, 2, 567-570(2015).

    [92] You-tao REN, Zheng-wen YANG, Yue-hui WANG. Reversible multiplexing for optical information recording, erasing, and reading-out in photochromic BaMgSiO4:Bi3+ luminescence ceramics. Science China Materials, 63, 582-592(2020).

    [93] Zong-song GAN, M D TURNER, Min GU. Biomimetic gyroid nanostructures exceeding their natural origins. Science Advances, 2(2016).

    [94] Hai-bo DING, Qi-ming ZHANG, Ming GU. 3D computer-aided nanoprinting for solid-state nanopores. Nanoscale Horizons, 3, 312-316(2018).

    [95] T KOSCHNY, C M SOUKOULIS, M WEGNER. Metamaterials in microwaves, optics, mechanics, thermodynamics, and transport. Journal of Optics, 19, 084005(2017).

    [96] T ERGIN, N STENGER, P BRENNER. Three-dimensional invisibility cloak at optical wavelengths. Science, 328, 337-339(2010).

    [97] C KERN, M KADIC, M WEGENER. Experimental evidence for sign reversal of the hall coefficient in three-dimensional metamaterials. Physical Review Letters, 118, 016601(2017).

    [98] M S RILL, C E KRIEGLER, M THIEL. Negative-index bi-anisotropic photonic metamaterial fabricated by direct laser writing and silver shadow evaporation. Optics Letters, 34, 19-21(2009).

    [99] J K GANSEL, M THIEL, M S RILL. Gold helix photonic metamaterial as broadband circular polarizer. Science, 325, 1513-1515(2009).

    Chen ZHANG, Jie ZHU, Yu ZHANG, Kai-ge WANG, Wei ZHAO, Ya-ping YANG, Xiao-qiang FENG, Hao-wei CHEN, Jin-tao BAI. Advances in Laser Nanofabrication Technology of High-molecular Polymer and Its Application (Invited)[J]. Acta Photonica Sinica, 2020, 49(11): 126
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