[1] GRUBER Michael, LEBERL Franz. Description and evaluation of the high quality photogrammetric scanner UltraScan 5000 [J]. Journal of Photogrammetry and Remote Sensing(S0924-2716), 2001, 55(5/6): 313-329.
[3] YALCINKAY Arda D, ERGENEMAN Olgac, UREY Hakan. Polymer magnetic scanners for bar code applications [J]. Sensors and Actuators A(S0924-4247), 2007, 135(1): 236-243.
[4] DOBBELAERE P D, FALTA K, FAN L, et al. Digital MEMS for Optical Switching [J]. IEEE Communications Magazine(S0163-6804), 2002, 40(3): 88-95.
[5] Dooyoung Hah, Sophia Huang, Hung Nguyen, et al. Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators [J]. Journal of Microelectromechanical Systems(S1057-7157), 2004, 13(2): 279-289.
[6] Winter C, Fabre L, Conte F Lo, et al. Micro-beamer based on MEMS micro-mirrors and laser light source [J]. Procedia Chemistry(S1876-6196), 2009, 1(1): 1311-1314.
[7] Tauscher Jason, Davis Wyatt O, Brown Dean, et al. Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics [J]. Proc.of SPIE(S0277-786X), 2010, 7590: 75940A.
[8] Meng-hsiung Kiang, Olav Solgaard, Richard S Muller, et al.Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners [C]//The Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego, USA, February 11-15, 1996. New York, USA: IEEE, 1996: 192-197.
[9] Youngjoo Yee, Hyo-Jin Nam, See-Hyung Lee, et al. PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage [C]//The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan, January 23-27, 2000. Piscataway, USA: IEEE, 2000: 435-440.
[10] XIE Hui-kai, SUN Jing-jing, GUO Shu-guang, et al. 3D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors [J]. Optics Express(S1094-4087), 2009, 18(12): 12065-12075.
[11] HUANG J M, LIU A Q, DENG Z L, et al. An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors [J]. Sensors and Actuators A(S0924-4247), 2004, 115(1): 159-167.
[12] LI Da-chao, XIAO Zhi-yong, WU Wen-gang, et al. Simulation Optimization and Measurement of MEMS Torsion Micro Mirrors for Optical MEMS Application [J]. International Journal of Nonlinear Science and Numerical Simulation(S1565-1339), 2002, 3(3/4): 341-344.
[13] TORTSCHANOFF A, LENZHOFER M, FRANK A, et al. Position encoding and phase control of resonant MOEMS mirrors [J]. Sensors and Actuators A(S0924-4247), 2010, 162(2): 235-240.
[14] WANG Chuan-wei, YU Hung-Hsiu, WU Ming-ching, et al. Implementation of phase-locked loop control for MEMS scanning mirror using DSP [J]. Sensors and Actuators A(S0924-4247), 2007, 133(1): 243-249.
[15] Tortschanoff A, Frank A, Wildenhain M, et al. Position feedback and phase control of resonant MOEMS-mirrors with one and two axes [J]. Procedia Engineering(S1877-7058), 2010, 5(1): 689-692.
[16] Schweizer S, Calmes S, Laudon M, et al. Thermally actuated optical microscanner with large angle and low consumption [J]. Sensors and Actuators A(S0924-4247), 1999, 76(1/3): 470-477.
