• Chinese Optics Letters
  • Vol. 2, Issue 11, 11654 (2004)
Huiling Li1、*, Xiaoyan Zeng1, Huifen Li2, Xiangyou Li1, and Yiqun Chen1
Author Affiliations
  • 1State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074
  • 2Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong
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    Huiling Li, Xiaoyan Zeng, Huifen Li, Xiangyou Li, Yiqun Chen. Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique[J]. Chinese Optics Letters, 2004, 2(11): 11654 Copy Citation Text show less

    Abstract

    The conventional technology could not fulfill the rapidly growing need for fine conductive lines for its inherent limits. Therefore, in this study laser micro-fine cladding and flexibly direct writing technique is used to obtain conductive lines with high precision and reliability. In the case of different substrates and parameters, film thickness will be different. Film thickness directly influences the reliability and stability of conductive lines with exception of quality and running speed. Therefore, we focus on developing the optimal parameters for the different substrates to achieve expected film thickness and make conductive lines have good performance and quality.
    Huiling Li, Xiaoyan Zeng, Huifen Li, Xiangyou Li, Yiqun Chen. Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique[J]. Chinese Optics Letters, 2004, 2(11): 11654
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