[1] Wang Hongjie, Guo Wengang, Dong Zhaohui et al.. Application of laser etching technology［J］. Infrared and Laser Engineering, 2004, 33(5): 469～472

[2] Zhao Zeyu, Hou Desheng, Dong Xiaochun et al.. Research on etching properties of polycarbonate by KrF excimer laser［J］. Opto-Electronic Engineering, 2004, 31(2): 4～7

[3] Zhang Lin, Lou Qihong, Wei Yunrang et al.. Micropatterns on polymers etched by excimer lasers［J］. Laser Technology, 2002, 126(2): 94～96

[4] Hong Tingfu, Zhu Weizhong, Liang Zhichuang et al.. Rapid fabrication of microfluidic chip on PMMA substrate by CO2 laser \[J\]. Nanotechnology and Precision Engineering, 2009, 7(4): 352～354

[5] Klank Henning, J. P. Kutter, O. Geschke. CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems［J］. Lab. Chip., 2002, 2(4): 242～246

[6] Detlef Sankenborg, Henning Klank, Jorg P. Kutter. Microstructure fabrication with a CO2 laser system［J］. J. Micromech. Microeng., 2004, 14(2): 182～189

[7] L. Romoli, G. Tantussi, G. Dini. Layered laser vaporization of PMMA manufacturing 3D mould cavities［J］. Annals of the CIRP, 2007, 56(1): 209～212

[8] Wilhelm Pfleging, Robert Kohler, Phillip Schierjott et al.. Laser patterning and packaging of CCD-CE-Chips made of PMMA［J］. Sensor. Actuat. B-Chem., 2009, 138(1): 336～343

[9] Qi Heng, Wang Songxian, Chen Tao et al.. Fabrication and application of PMMA continuous-flow PCR microfluidic chip with CO2 laser direct-writing ablation micromaching technique［J］. Chinese J. Lasers, 2009, 36(5): 1239～1245

[10] Xiang Hengfu, Fu Jianzhong, Chen Zichen. Dynamic interface for three-dimensional transient laser ablation polymer micro-channels［J］. J. Zhejiang University (Engineering Science), 2007, 41(11): 1908～1911

[11] Mao Shisong, Cheng Yiming, Pu Xiaolong. Probability and Statistics Tutorial［M］. Beijing: Higher Education Press, 2008. 418～419

[12] Yongguang Huang, Shibing Liu, Wei Yang et al.. Surface roughness analysis and improvement of PMMA-based microfluidic chip chabers by CO2 laser cutting［J］. Appl. Surf. Sci., 2010, 256(6): 1675～1678

[13] Zuo Tiechuang. The 21st Century′s Advanced Manufacturing-Laser Technology and Engineering［M］. Beijing: Science Press, 2007. 13～14

[14] M. G. Baeva. CW CO2 laser cutting of plastics［C］. SPIE, 1997, 3092: 772～775

[15] S. Turchetta, L. Carrino. An energy based model for laser cutting natural stone［J］. Int. J. Mach. Tool. Manu., 2005, 45(7-8): 761～767

[16] H. Arisawa, T. B. Brill. Kinetics and mechanisms of flash pyrolysis of poly (methyl methacrylate) (PMMA)［J］. Combust and Flame, 1997, 109(3): 415～426